Mounting device comprising semiconductor chip mounted through thermo-compression tool and mounting method thereof
In this mounting device ( 10 ) for mounting a semiconductor chip ( 100 ) on a substrate ( 104 ), a controller ( 50 ) is provided with: a mounter for pressing the semiconductor chip ( 100 ) to the substrate ( 104 ) in a state where a cover film ( 110 ) is interposed between the semiconductor chip ( 100 ) and a thermocompression tool ( 16 ), and for heating and then cooling the thermocompression tool ( 16 ) to mount the semiconductor chip ( 100 ) on the substrate ( 104 ); and a separator for heating the thermocompression tool ( 16 ) after the semiconductor chip ( 100 ) has been mounted, and for raising a mounting head ( 17 ) to be separated from the cover film ( 110 ).
1 . A mounting device for mounting a semiconductor chip on an object to be mounted via an adhesive material, the mounting device comprising:
a mounting head to which a thermocompression tool and a tool heating/cooling mechanism are attached, wherein the thermocompression tool holds the semiconductor chip and moves the semiconductor chip in a direction to contact or be separated from the object to be mounted to press the semiconductor chip to the object to be mounted, and the tool heating/cooling mechanism heats and cools the thermocompression tool;
a film arrangement mechanism which moves a cover film to arrange the cover film between the semiconductor chip pressed to the object to be mounted and the thermocompression tool; and
a controller which controls movement of the mounting head and the film arrangement mechanism and controls a temperature of the thermocompression tool by the tool heating/cooling mechanism,
wherein the controller comprises:
a mounter which presses the semiconductor chip to the object to be mounted in a state where the cover film is interposed between the semiconductor chip and the thermocompression tool, heats the thermocompression tool to a first temperature and then cools the thermocompression tool to mount the semiconductor chip on the object to be mounted; and
a separator which heats the thermocompression tool to a predetermined temperature lower than the first temperature and then raises the mounting head to separate the mounting head from the cover film after mounting the semiconductor chip.
2 . The mounting device according to claim 1 , wherein the separator heats the thermocompression tool to the predetermined temperature by the tool heating/cooling mechanism in a state of slightly raising the mounting head after the semiconductor chip is mounted on the object to be mounted, and then raises the mounting head.
3 . The mounting device according to claim 1 , wherein the thermocompression tool sucks and holds the semiconductor chip,
the mounter sucks and holds the semiconductor chip on the thermocompression tool, and lowers the mounting head to temporarily pressure-bond the semiconductor chip onto the object to be mounted via the adhesive material, and
interposes the cover film between the semiconductor chip and the thermocompression tool, and presses the temporarily pressure-bonded semiconductor chip to mount the semiconductor chip on the object to be mounted.
4 . A mounting method for mounting a semiconductor chip on an object to be mounted via an adhesive material, the mounting method comprising:
a preparation step of preparing a mounting device comprising: a mounting head which has a tip attached with a thermocompression tool that holds the semiconductor chip and moves the semiconductor chip in a direction to contact or be separated from the object to be mounted to press the semiconductor chip to the object to be mounted, a tool heating/cooling mechanism which is attached to the mounting head to heat and cool the thermocompression tool, and a film arrangement mechanism which arranges a cover film between the semiconductor chip and the thermocompression tool;
a film arrangement step of interposing the cover film between the semiconductor chip and the thermocompression tool by the film arrangement mechanism when the semiconductor chip is mounted on the object to be mounted;
a mounting step of pressing the semiconductor chip to the object to be mounted in a state where the cover film is interposed between the semiconductor chip and the thermocompression tool, heating the thermocompression tool to a first temperature and then cooling the thermocompression tool to mount the semiconductor chip on the object to be mounted; and
a separation step of heating the thermocompression tool to a predetermined temperature lower than the first temperature and then raising the mounting head to separate the mounting head from the cover film after the mounting step.
5 . The mounting device according to claim 2 , wherein the thermocompression tool sucks and holds the semiconductor chip,
the mounter sucks and holds the semiconductor chip on the thermocompression tool, and lowers the mounting head to temporarily pressure-bond the semiconductor chip onto the object to be mounted via the adhesive material, and
interposes the cover film between the semiconductor chip and the thermocompression tool, and presses the temporarily pressure-bonded semiconductor chip to mount the semiconductor chip on the object to be mounted.