Display substrate and display device
A display substrate and a display device are provided. The display substrate includes: a base substrate, and a low temperature poly-silicon thin film transistor and a metal oxide thin film transistor on the base substrate; the low temperature poly-silicon thin film transistor includes: a low temperature poly-silicon semiconductor layer, a first gate insulating layer, a first gate electrode, a first interlayer insulating layer, a first source electrode, and a first drain electrode; the metal oxide thin film transistor includes: a metal oxide semiconductor layer, a second gate insulating layer, a second gate electrode, a second interlayer insulating layer, a passivation layer, a second source electrode, and a second drain electrode; the second source electrode is on a side of the metal oxide semiconductor layer close to the base substrate; and the second drain electrode is on a side of the metal oxide semiconductor layer away from the base substrate.
1 . A display substrate, comprising: a base substrate, and at least one low temperature poly-silicon thin film transistor and at least one metal oxide thin film transistor on the base substrate;
the low temperature poly-silicon thin film transistor comprises: a low temperature poly-silicon semiconductor layer, a first gate insulating layer, a first gate electrode, a first interlayer insulating layer, a first source electrode, and a first drain electrode;
the metal oxide thin film transistor comprises: a metal oxide semiconductor layer, a second gate insulating layer, a second gate electrode, a second interlayer insulating layer, a passivation layer, a second source electrode, and a second drain electrode; and
the metal oxide semiconductor layer and the low temperature poly-silicon semiconductor layer are in different layers; the second source electrode is on a side of the metal oxide semiconductor layer close to the base substrate; and the second drain electrode is on a side of the metal oxide semiconductor layer away from the base substrate,
wherein the display substrate further comprises a second conductive layer on the base substrate; and
the second conductive layer comprises: the first source electrode, the first drain electrode, and the second source electrode.
2 . The display substrate of claim 1 , wherein the first source electrode and the first drain electrode are on a side of the first interlayer insulating layer away from the base substrate; and
the first source electrode is connected to a source contact region of the low temperature poly-silicon semiconductor layer through a fifth via hole penetrating through the first gate insulating layer and the first interlayer insulating layer; and the first drain electrode is connected to a drain contact region of the low temperature poly-silicon semiconductor layer through a sixth via hole penetrating through the first gate insulating layer and the first interlayer insulating layer.
3 . The display substrate of claim 1 , wherein a material of the metal oxide semiconductor layer comprises at least one of indium gallium zinc oxide, indium gallium tin oxide, and indium tin zinc oxide.
4 . The display substrate of claim 1 , wherein a material of the second drain electrode comprises: a transparent metal oxide.
5 . The display substrate of claim 4 , wherein the transparent metal oxide comprises: indium tin oxide.
6 . A display device, comprising the display substrate of claim 1 .
7 . The display device of claim 6 , wherein the display device is a virtual reality display device or an augmented reality display device, and a resolution of the virtual reality display device or the augmented reality display device is greater than or equal to 1500 PPI.
8 . The display substrate of claim 1 , wherein the second source electrode and a source contact region of the metal oxide semiconductor layer are lapped over each other; and
the second drain electrode is connected to a drain contact region of the metal oxide semiconductor layer through a second via hole penetrating through the second gate insulating layer, the second interlayer insulating layer, and the passivation layer.
9 . The display substrate of claim 8 , wherein the metal oxide thin film transistor further comprises: a light-shielding layer between the first gate insulating layer and the first interlayer insulating layer and covering at least a channel region of the metal oxide semiconductor layer; and
the light-shielding layer is connected to the second gate electrode through a fourth via hole penetrating through the second gate insulating layer and the first interlayer insulating layer.
10 . The display substrate of claim 8 , wherein the metal oxide thin film transistor further comprises: a light-shielding layer between the first gate insulating layer and the first interlayer insulating layer and covering at least a channel region of the metal oxide semiconductor layer; and
the light-shielding layer is connected to the second source electrode through a third via hole penetrating through the first interlayer insulating layer.
11 . The display substrate of claim 1 , wherein the metal oxide thin film transistor further comprises: a buffer layer between the second source electrode and the metal oxide semiconductor layer;
the second source electrode is connected to a source contact region of the metal oxide semiconductor layer through a first via hole penetrating through the buffer layer; and
the second drain electrode is connected to a drain contact region of the metal oxide semiconductor layer through a second via hole penetrating through the second gate insulating layer, the second interlayer insulating layer, and the passivation layer.
12 . The display substrate of claim 11 , wherein a width of the source contact region of the metal oxide semiconductor layer is 0.1 μm to 1.5 μm greater than a width of the drain contact region of the metal oxide semiconductor layer.
13 . The display substrate of claim 11 , wherein the metal oxide thin film transistor further comprises: a light-shielding between the first gate insulating layer and the first interlayer insulating layer and covering at least a channel region of the metal oxide semiconductor layer; and
the light-shielding layer is connected to the second gate electrode through a fourth via hole penetrating through the second gate insulating layer, the buffer layer, and the first interlayer insulating layer.
14 . The display substrate of claim 11 , wherein the metal oxide thin film transistor further comprises: a light-shielding layer between the first gate insulating layer and the first interlayer insulating layer and covering at least a channel region of the metal oxide semiconductor layer; and
the light-shielding layer is connected to the second source electrode through a third via hole penetrating through the first interlayer insulating layer.
15 . The display substrate of claim 14 , further comprising: a first conductive layer on the base substrate; and
the first conductive layer comprises: the first gate electrode and the light-shielding layer.