Resist underlying film-forming composition comprising a reaction product with a glycidyl ester compound
A resist underlayer film having a particularly high dry etching rate; a resist underlayer film-forming composition; a resist pattern forming method; and a semiconductor device production method. The resist underlayer film-forming composition contains a solvent and an epoxy adduct obtained by reacting a compound represented by formula (1) and an epoxy adduct-forming compound. The epoxy adduct-forming compound is one or more compounds selected from the group made of carboxylic acid-containing compounds, carboxylic anhydride-containing compounds, hydroxy group-containing compounds, thiol group-containing compounds, amino group-containing compounds, and imide group-containing compounds.
1 . A resist underlying film-forming composition comprising a solvent, and an epoxy addition product, which is a reaction product of an epoxy addition product-forming compound and a compound represented by the following formula (1):
wherein, in formulae (1), X is a divalent organic group represented by formula (2), (3), or (4) below, and each of n1 and n2 independently represents an integer of 1 to 10:
wherein, in formulae (2), (3), and (4),
each of R 1 and R 2 independently represents a hydrogen atom, an alkyl group having 1 to 10 carbon atoms and being optionally interrupted by an oxygen atom or a sulfur atom, an alkenyl group having 2 to 10 carbon atoms and being optionally interrupted by an oxygen atom or a sulfur atom, an alkynyl group having 2 to 10 carbon atoms and being optionally interrupted by an oxygen atom or a sulfur atom, a benzyl group, or a phenyl group, wherein the phenyl group is optionally substituted with at least one monovalent functional group selected from the group consisting of an alkyl group having 1 to 6 carbon atoms, a halogen atom, an alkoxy group having 1 to 10 carbon atoms, a nitro group, a cyano group, and an alkylthio group having 1 to 6 carbon atoms, and
R 3 represents a hydrogen atom, an alkyl group having 1 to 10 carbon atoms and being optionally interrupted by an oxygen atom or a sulfur atom, an alkenyl group having 3 to 10 carbon atoms and being optionally interrupted by an oxygen atom or a sulfur atom, an alkynyl group having 3 to 10 carbon atoms and being optionally interrupted by an oxygen atom or a sulfur atom, a benzyl group, or a phenyl group, wherein when R 3 is a phenyl group, the phenyl group is optionally substituted with at least one monovalent functional group selected from the group consisting of an alkyl group having 1 to 6 carbon atoms, a halogen atom, an alkoxy group having 1 to 10 carbon atoms, a nitro group, a cyano group, and an alkylthio group having 1 to 6 carbon atoms,
wherein the epoxy addition product-forming compound is a carboxylic acid-containing compound or a thiol group-containing compound, and
wherein the carboxylic acid-containing compound is a dicarboxylic acid having at least one sulfur atom.
2 . The resist underlying film-forming composition according to claim 1 , wherein the dicarboxylic acid having at least one sulfur atom is an aliphatic dicarboxylic acid.
3 . The resist underlying film-forming composition according to claim 1 , further comprising a crosslinking catalyst.
4 . The resist underlying film-forming composition according to claim 1 , further comprising a crosslinking agent.
5 . The resist underlying film-forming composition according to claim 1 , further comprising a surfactant.
6 . A resist underlying film which is a baked product of an applied film comprising the resist underlying film-forming composition according to claim 1 .
7 . A method for producing a patterned substrate, comprising the steps of: applying the resist underlying film-forming composition according to claim 1 onto a semiconductor substrate and baking the applied composition to form a resist underlying film; applying a resist onto the resist underlying film and baking the applied resist to form a resist film; subjecting the semiconductor substrate covered with the resist underlying film and the resist to exposure; and subjecting the exposed resist film to development to perform patterning.
8 . A method for producing a semiconductor device, comprising the steps of:
forming a resist underlying film comprising the resist underlying film-forming composition according to claim 1 on a semiconductor substrate;
forming a resist film on the resist underlying film;
irradiating the resist film with a light or an electron beam and subjecting the resultant resist film to development to form a resist pattern;
etching the resist underlying film through the formed resist pattern to form a patterned resist underlying film; and
processing the semiconductor substrate using the patterned resist underlying film.
9 . The resist underlying film-forming composition according to claim 1 , wherein the epoxy addition product has a weight average molecular weight of 1,000 to 100,000.
10 . The resist underlying film-forming composition according to claim 1 , further comprising at least one selected from the group consisting of a light absorber, a rheology modifier, and a bonding auxiliary.
11 . The method according to claim 8 , wherein a thickness of the formed resist underlying film is within a range of 0.001 μm to 10 μm.
12 . The resist underlying film-forming composition according to claim 1 , wherein, in formula (1), X is represented by formula (4).
13 . The resist underlying film-forming composition according to claim 1 , wherein, in formula (1), n, and n2 are 1, and R 3 is an alkyl group having 1 to 5 carbon atoms and being optionally interrupted by an oxygen atom.