Oxide electrode-based 3-terminal neuromorphic synaptic device containing mobile ions, and method of manufacturing the same
View Patent ↗Disclosed is a 3-terminal neuromorphic synaptic device including a substrate, a source electrode and a drain electrode provided on the substrate to be spaced apart from each other, a channel area provided on the substrate to be electrically connected to the source electrode and the drain electrode, between the source electrode and the drain electrode, an ion transport layer provided on the channel area, a gate electrode provided on the ion transport layer, and a voltage application part that applies a gate voltage to the gate electrode. The gate electrode is formed of at least one of an oxide-based material including mobile ions, a chalcogenide-based material including the mobile ions, and a nitride-based material including the mobile ions.
1 . A 3-terminal neuromorphic synaptic device comprising:
a substrate;
a source electrode and a drain electrode provided on the substrate to be spaced apart from each other;
a channel area provided on the substrate to be electrically connected to the source electrode and the drain electrode, between the source electrode and the drain electrode;
an ion transport layer provided on the channel area;
a gate electrode provided on the ion transport layer, the gate electrode including a hollow cylinder; and
a voltage application part configured to apply a gate voltage to the gate electrode,
wherein the gate electrode is formed of at least one of an oxide-based material including mobile ions, a chalcogenide-based material including the mobile ions, and a nitride-based material including the mobile ions,
wherein the ion transport layer includes:
a first cylinder on which the hollow cylinder is provided; and
a second cylinder provided on the first cylinder and surrounded by the hollow cylinder, a diameter of the second cylinder being less than a diameter of the first cylinder,
wherein an outer diameter of the hollow cylinder is equal to the diameter of the first cylinder,
wherein a height of the hollow cylinder is equal to a height of the second cylinder.
2 . The 3-terminal neuromorphic synaptic device of claim 1 , wherein the mobile ions are copper ions, and a mass ratio of the copper ions in the gate electrode is more than 84.2% and less than 93.7%.
3 . The 3-terminal neuromorphic synaptic device of claim 1 , wherein the ion transport layer has a thickness of more than 20 nanometers and less than 30 nanometers.
4 . The 3-terminal neuromorphic synaptic device of claim 1 , wherein the gate electrode includes:
a second gate electrode laminated on the ion transport layer; and
a first gate electrode laminated on the second gate electrode, and
wherein a mass ratio of the mobile ions included in the first gate electrode is higher than a mass ratio of the mobile ions included in the second gate electrode.
5 . The 3-terminal neuromorphic synaptic device of claim 4 , wherein the gate electrode further includes:
a third gate electrode laminated on the first gate electrode, and
wherein a mass ratio of the mobile ions included in the third gate electrode is higher than the mass ratio of the mobile ions included in the first gate electrode.
6 . The 3-terminal neuromorphic synaptic device of claim 1 , wherein a barrier layer is provided between the ion transport layer and the gate electrode, and
wherein the barrier layer includes Ti, Ta, TiW, or TiN.