Redistribution substrate, semiconductor package including the same, and method of fabricating redistribution substrate
A redistribution substrate includes first and second insulating layers; a wiring layer, and a metal layer. The wiring pattern includes a via portion penetrating the first insulating layer and a pad portion on the via portion, the pad portion extending onto an upper surface of the first insulating layer. The metal layer covers an upper surface of the wiring pattern. The second insulating layer is provided on the first insulating layer and covers the pad portion and the metal layer. The wiring pattern includes a first metal. The metal layer includes the first metal and a second metal. The metal layer includes a first portion vertically overlapping the pad portion, and a second portion surrounding the first portion, and a concentration of the first metal in the first portion of the metal layer is greater than a concentration of the first metal in the second portion of the metal layer.
1 . A redistribution substrate comprising:
a first insulating layer;
a wiring pattern including a via portion penetrating the first insulating layer and a pad portion on the via portion, the pad portion extending onto an upper surface of the first insulating layer;
a metal layer covering an upper surface of the wiring pattern; and
a second insulating layer on the first insulating layer, the second insulating layer covering the pad portion and the metal layer,
wherein the wiring pattern includes a first metal,
wherein the metal layer includes the first metal and a second metal,
wherein the metal layer includes:
a first portion vertically overlapping the pad portion; and
a second portion surrounding the first portion, and
wherein a concentration of the first metal in the first portion of the metal layer is greater than a concentration of the first metal in the second portion of the metal layer.
2 . The redistribution substrate of claim 1 , wherein a width of the metal layer is greater than a width of the pad portion.
3 . The redistribution substrate of claim 1 , wherein the concentration of the first metal in the first portion of the metal layer decreases as a distance from an interface between the metal layer and the pad portion increases.
4 . The redistribution substrate of claim 1 , wherein a portion of the metal layer adjacent to an upper surface of the metal layer and adjacent to side surfaces of the metal layer does not include the first metal.
5 . The redistribution substrate of claim 1 , wherein a thickness of the metal layer is smaller than a thickness of the pad portion.
6 . The redistribution substrate of claim 1 , wherein the metal layer has a thickness of 300 Å to 1500 Å.
7 . The redistribution substrate of claim 1 , wherein the first metal includes copper (Cu), and
wherein the second metal includes nickel (Ni).
8 . The redistribution substrate of claim 1 , wherein a width of the via portion increases as a distance from the pad portion decreases, and
wherein a width of the pad portion is greater than a maximum width of the via portion.
9 . A semiconductor package comprising:
a first redistribution substrate;
a semiconductor chip mounted on the first redistribution substrate; and
a molding layer on an upper surface of the first redistribution substrate and covering the semiconductor chip,
wherein the first redistribution substrate includes:
a first insulating layer;
a wiring pattern including a via portion penetrating the first insulating layer and a pad portion on the via portion, the pad portion extending onto an upper surface of the first insulating layer;
a metal layer covering an upper surface of the wiring pattern; and
a second insulating layer on the first insulating layer, the second insulating layer covering the pad portion and the metal layer,
wherein a width of the metal layer is greater than a width of the pad portion, and
wherein a thickness of the metal layer is 300 Å to 1500 Å.
10 . The semiconductor package of claim 9 , wherein the metal layer includes a first metal and a second metal,
wherein the first metal includes copper, and
wherein the second metal includes nickel.
11 . The semiconductor package of claim 10 , wherein the metal layer includes:
a first portion vertically overlapping the pad portion; and
a second portion that does not vertically overlap the pad portion,
wherein a concentration of the first metal in the first portion of the metal layer is greater than a concentration of the first metal in the second portion of the metal layer.
12 . The semiconductor package of claim 10 , wherein a concentration of the first metal in the metal layer decreases as a distance from an interface between the metal layer and the pad portion increases.
13 . The semiconductor package of claim 9 , wherein a width of the via portion increases as a distance from the pad portion decreases,
wherein a width of the pad portion is greater than a maximum width of the via portion.
14 . The semiconductor package of claim 9 , wherein the metal layer is in contact with an entire upper surface of the wiring pattern.