IP Library Granted Patent US 12,588,432
Granted Patent B2
US 12,588,432 · App. 18/112,159 · Granted Mar 24, 2026

Methods for transferring graphene to substrates and related lithographic stacks and laminates

Inventors: Vivek Pandey (Ujjain, IN); Leandro Forciniti (Wharton, NJ)
Assignee: Bard Access Systems, Inc.
H01L21/02444H01L21/02282H01L21/02505H01L21/02527
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Quick Facts
Patent No.
US 12,588,432
App. No.
18/112,159
Granted
Mar 24, 2026
Kind
B2
Abstract

Methods for transferring graphene to substrates include at least a method for transferring a graphene-metal bilayer to a substrate to form a laminate thereof. The method can include applying a first continuous polymer layer to a graphene layer of the graphene-metal bilayer; applying a first discontinuous polymer layer to the first continuous polymer layer; applying a second continuous polymer layer to a metal layer of the graphene-metal bilayer; applying a second discontinuous polymer layer to the second continuous polymer layer; etching the first continuous polymer layer with a first etchant through the first discontinuous polymer layer; laminating the substrate by pressing the face of the graphene layer into a surface of the substrate; etching the second continuous polymer layer with a second etchant through the second discontinuous polymer layer, thereby transferring the graphene-metal bilayer to the substrate to form the laminate.

Claims (36)

1 . A method of transferring a graphene-metal bilayer to a substrate, comprising:

applying a first continuous polymer layer to an exposed face of a graphene layer of the graphene-metal bilayer;

applying a first discontinuous polymer layer to an exposed face of the first continuous polymer layer, thereby forming a first sacrificial layer of the first continuous polymer layer and the first discontinuous polymer layer;

applying a second continuous polymer layer to an exposed face of a metal layer of the graphene-metal bilayer;

applying a second discontinuous polymer layer to an exposed face of the second continuous polymer layer, thereby forming a second sacrificial layer of the second continuous polymer layer and the second discontinuous polymer layer;

selectively etching the first continuous polymer layer with a first etchant through the first discontinuous polymer layer, thereby removing the first sacrificial layer and reexposing the face of the graphene layer;

laminating the substrate by pressing the face of the graphene layer into a surface of the substrate; and

selectively etching the second continuous polymer layer with a second etchant through the second discontinuous polymer layer, thereby removing the second sacrificial layer, reexposing the face of the metal layer, and transferring the graphene-metal bilayer to the substrate.

2 . The method of claim 1 , wherein the graphene layer is monolayer graphene.

3 . The method of claim 1 , wherein the graphene layer is bilayer graphene.

4 . The method of claim 1 , wherein the graphene layer is multilayer graphene having three or more layers of graphene.

5 . The method of claim 1 , wherein applying the first continuous polymer layer to the exposed face of the graphene layer includes spray coating or spin coating the first continuous polymer layer onto the exposed face of the graphene layer.

6 . The method of claim 1 , wherein the first continuous polymer layer is about 1-2 μm thick after applying the first continuous polymer layer to the exposed face of the graphene layer.

7 . The method of claim 1 , wherein the first continuous polymer layer is poly(methyl methacrylate) (“PMMA”).

8 . The method of claim 1 , wherein applying the first discontinuous polymer layer to the exposed face of the first continuous polymer layer includes pressing the first discontinuous polymer layer into the exposed face of the first continuous polymer layer with heat.

9 . The method of claim 1 , wherein the first discontinuous polymer layer is perforated therethrough with an array of perforations, thereby allowing the first etchant to permeate through the first discontinuous polymer layer during selective etching of the first continuous polymer layer.

10 . The method of claim 1 , wherein applying the second continuous polymer layer to the exposed face of the metal layer includes spray coating or spin coating the second continuous polymer layer onto the exposed face of the metal layer.

11 . The method of claim 1 , wherein the second continuous polymer layer is about 1-2 μm thick after applying the second continuous polymer layer to the exposed face of the metal layer.

12 . The method of claim 1 , wherein the second continuous polymer layer is poly(vinyl alcohol) (“PVA”).

13 . The method of claim 1 , wherein applying the second discontinuous polymer layer to the exposed face of the second continuous polymer layer includes pressing the second discontinuous polymer layer into the exposed face of the second continuous polymer layer with heat.

14 . The method of claim 1 , wherein the second discontinuous polymer layer is perforated therethrough with an array of perforations, thereby allowing the second etchant to permeate through the second discontinuous polymer layer during selective etching of the second continuous polymer layer.

15 . The method of claim 1 , wherein each discontinuous polymer layer of the first discontinuous polymer layer and the second discontinuous polymer layer is independently polyimide (“PI”), poly(ethylene terephthalate) (“PET”), or poly(ethylene naphthalate) (“PEN”).

16 . The method of claim 1 , wherein the first etchant is acetone.

17 . The method of claim 1 , further comprising applying an adhesive to the surface of the substrate before laminating the substrate.

18 . The method of claim 1 , wherein the substrate is a catheter tube or Luer connector of a catheter.

19 . The method of claim 1 , wherein the substrate is thermoplastic polyurethane (“TPU”).

20 . The method of claim 1 , wherein the second etchant is water.

21 . A method of transferring a graphene-metal bilayer to a substrate, comprising:

spray coating or spin coating a first continuous polymer layer of poly(methyl methacrylate) (“PMMA”) with a thickness of about 1-2 μm onto an exposed face of a graphene layer of monolayer graphene, bilayer graphene, or multilayer graphene of the graphene-metal bilayer;

pressing a first discontinuous polymer layer of polyimide (“PI”), poly(ethylene terephthalate) (“PET”), or poly(ethylene naphthalate) (“PEN”) with a thickness of about 25-50 μm into an exposed face of the first continuous polymer layer with heat, the first discontinuous polymer layer perforated therethrough with the array of perforations;

spray coating or spin coating a second continuous polymer layer of poly(vinyl alcohol) (“PVA”) with a thickness of about 1-2 μm onto an exposed face of a metal layer of the graphene-metal bilayer;

pressing a second discontinuous polymer layer of PI, PET, or PEN with a thickness of about 25-50 μm into an exposed face of the second continuous polymer layer with heat, the second discontinuous polymer layer perforated therethrough with the array of perforations;

selectively etching the first continuous polymer layer with a first etchant of acetone through the perforations of the first discontinuous polymer layer to reexpose the face of the graphene layer;

laminating the substrate of thermoplastic polyurethane (“TPU”) by pressing the face of the graphene layer into a surface of the substrate, the surface of the substrate optionally including an adhesive applied thereon; and

selectively etching the second continuous polymer layer with a second etchant of water through the perforations of the second discontinuous polymer layer to reexpose the face of the metal layer, thereby transferring the graphene-metal bilayer to the substrate.

22 . The method of claim 21 , wherein the substrate is a catheter tube or Luer connector of a catheter.

Continuity (2)
Provisional Application 63314219 · Feb 25, 2022
Related Publication 20230274933A1 · Aug 31, 2023
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