Semiconductor device, method for manufacturing semiconductor device, and electronic apparatus including the semiconductor device
View Patent ↗The present disclosure provides a semiconductor device, a method for manufacturing the semiconductor device, and electronic equipment including the semiconductor device. According to embodiments, a semiconductor device may include a channel portion, source/drain portions in contact with the channel portion on opposite sides of the channel portion, and a gate stack intersecting the channel portion. The channel portion includes a first part extending in a vertical direction relative to the substrate and a second part extending from the first part in a lateral direction relative to the substrate.
1 . A semiconductor device, comprising:
a channel portion, comprising:
a first part extending in a vertical direction relative to a substrate; and
a plurality of second parts extending from the first part in a lateral direction relative to the substrate;
source/drain portions in contact with the channel portion on two opposite sides of the channel portion;
a gate stack intersecting the channel portion,
wherein a surface of a first portion of the substrate has a height in the vertical direction less than a height of a surface of a second portion of the substrate other than the first portion of the substrate in the vertical direction, an orthographic projection of the plurality of second parts of the channel portion on the substrate overlaps with the first portion of the substrate,
a first isolation portion formed on the first portion of the substrate;
a second isolation portion formed on the second portion of the substrate;
wherein an orthographic projection of a boundary between the first portion of the substrate and the second portion of the substrate overlaps with the first part of the channel portion.
2 . The semiconductor device according to claim 1 , wherein the plurality of second parts are spaced apart from each other in the vertical direction.
3 . The semiconductor device according to claim 1 , wherein the channel portion comprises a single crystal semiconductor material.
4 . The semiconductor device according to claim 1 , wherein at least one of an interface between the first part of the channel portion and the source/drain portions, an interface between the plurality of second parts of the channel portion and the source/drain portions, and an interface between the first part and the second part of the channel portion is a crystal interface.
5 . The semiconductor device according to claim 1 , wherein the first part is in a form of a fin, and the plurality of second parts is in the form of a nanosheet.
6 . The semiconductor device according to claim 1 , wherein the plurality of second parts substantially extend from the first part toward a same side of the first part in the lateral direction relative to the substrate.
7 . The semiconductor device according to claim 6 , wherein the plurality of second parts have a substantially same shape and are substantially aligned with each other in the vertical direction.
8 . The semiconductor device according to claim 1 , further comprising:
a spacer formed on sidewalls of the gate stack, wherein sidewalls of the spacer facing each source/drain portion are substantially coplanar in the vertical direction.
9 . The semiconductor device according to claim 8 , wherein the spacer comprises:
a first part extending on both sides of the channel portion and on an uppermost second part of the channel portion; and
a second part extending between the second parts of the channel portion and between a lowest second part of the channel portion and the substrate,
wherein the first part and the second part of the spacer comprise different materials.
10 . The semiconductor device according to claim 1 , wherein the gate stack extends on an upper surface and a lower surface of each second part, and a sidewall of a part of the gate stack that extends on the upper surface of each second part is substantially aligned to a sidewall of a part of the gate stack that extends on the lower surface of a corresponding second part in the vertical direction.
11 . The semiconductor device according to claim 1 , wherein a sidewall of a part of the gate stack that intersects the plurality of second parts of the channel portion is substantially aligned to a sidewall of a part of the gate stack that intersects the first part of the channel portion.
12 . The semiconductor device according to claim 1 , wherein a top surface of the first part of the channel portion is higher than a top surface of an uppermost second part.
13 . The semiconductor device according to claim 1 , further comprising: a wherein the first isolation portion is arranged between the channel portion and the substrate.
14 . The semiconductor device according to claim 13 ,
wherein the gate stack is formed on the first isolation portion and the second isolation portion.
15 . The semiconductor device according to claim 14 , further comprising: a punch-through stopper located below the first part of the channel portion between the first isolation portion and the second isolation portion.
16 . The semiconductor device according to claim 15 , wherein the punch-through stopper is a semiconductor in contact with the substrate.
17 . The semiconductor device according to claim 16 , wherein
the semiconductor device is an n-type device, and the semiconductor of the punch-through stopper is p-type doped; or
the semiconductor device is a p-type device, and the semiconductor of the punch-through stopper is n-type doped.
18 . The semiconductor device according to claim 14 , wherein the first isolation portion contacts with the second isolation portion in a longitudinal extension direction of the gate stack.
19 . The semiconductor device according to claim 13 , wherein the first part of the channel portion is isolated from the substrate by the first isolation portion.
20 . The semiconductor device according to claim 13 , wherein the first isolation part is located below the first part of the channel portion between the source/drain portions.
21 . The semiconductor device according to claim 13 , wherein a sidewall of the first isolation portion facing each source/drain portion is substantially parallel to a corresponding sidewall of the gate stack.
22 . The semiconductor device according to claim 1 , wherein the first part and the plurality of second parts of the channel portion comprise different semiconductor materials.
23 . The semiconductor device according to claim 1 , wherein the first part and the plurality of second parts of the channel portion have different doping concentrations and/or different doping impurities.
24 . An electronic apparatus comprising the semiconductor device according to claim 1 .
25 . The electronic apparatus according to claim 24 , wherein the electronic apparatus comprises a smart phone, a computer, a tablet, an artificial intelligence device, a wearable device, or a mobile power supply.