Semiconductor device and method for manufacturing semiconductor device
View Patent ↗A method for manufacturing a semiconductor device with a high yield is provided. In a semiconductor device including an oxide semiconductor over a substrate, when an insulator in contact with the oxide semiconductor, such as a gate insulator or an interlayer film, is deposited, the insulator can be deposited without diffusion of hydrogen into the oxide semiconductor by setting a constant derived from deposition conditions within a given range. Specifically, setting values of deposition power, the effective electrode area, deposition pressure, and the flow rate of a deposition gas containing hydrogen in the deposition conditions can be selected as appropriate.
1 . A method for manufacturing a semiconductor device, comprising:
forming an oxide semiconductor over a substrate;
forming a conductor over and in contact with the oxide semiconductor;
removing part of the conductor and part of the oxide semiconductor, thereby forming an island-shaped conductor and an island-shaped oxide semiconductor, and
forming an insulator over the island-shaped conductor by a chemical vapor deposition method under conditions satisfying a relation of Formula (1) below,
[
Formula
1
]
0
<
(
PW
[
W
]
/
S
[
cm
2
]
)
×
P
[
P
a
]
f
[
sccm
]
≤
8
(
1
)
wherein PW [W] represents a deposition power, S [cm 2 ] represents an effective electrode area, P [Pa] represents a deposition pressure, and f [sccm] represents a flow rate of a silane-based deposition gas,
wherein PW [W] is 85 or less, and
wherein P [Pa] is 100 or less.
2 . The method for manufacturing a semiconductor device, according to claim 1 , further comprising:
removing part of the island-shaped conductor, thereby exposing the island-shaped oxide semiconductor,
wherein the insulator is deposited in an exposed region of the island-shaped oxide semiconductor.
3 . The method for manufacturing a semiconductor device, according to claim 2 , further comprising:
depositing a metal oxide film over and in contact with the island-shaped conductor.
4 . The method for manufacturing a semiconductor device, according to claim 3 , wherein the metal oxide film inhibits diffusion of hydrogen and impurities.
5 . The method for manufacturing a semiconductor device, according to claim 4 , wherein the metal oxide film is an insulating film.
6 . The method for manufacturing a semiconductor device, according to claim 1 , wherein the oxide semiconductor is an In—Ga—Zn oxide.
7 . The method for manufacturing a semiconductor device, according to claim 1 , wherein the conductor comprises nitrogen.
8 . The method for manufacturing a semiconductor device, according to claim 1 , wherein P [Pa] is 40 or less.
9 . The method for manufacturing a semiconductor device, according to claim 1 , further comprising:
removing part of the insulator and part of the island-shaped conductor, thereby exposing the island-shaped oxide semiconductor.
10 . A method for manufacturing a semiconductor device, comprising:
forming an oxide semiconductor over a substrate;
forming a conductor over and in contact with the oxide semiconductor;
removing part of the conductor and part of the oxide semiconductor, thereby forming an island-shaped conductor and an island-shaped oxide semiconductor, and
forming an insulator over the island-shaped conductor by a chemical vapor deposition method under conditions satisfying a relation of Formula (2) below,
[
Formula
2
]
0
<
(
PW
[
W
]
/
S
[
cm
2
]
)
×
P
[
P
a
]
f
[
sccm
]
≤
7
(
2
)
wherein PW [W] represents a deposition power, S [cm 2 ] represents an effective electrode area, P [Pa] represents a deposition pressure, and f [sccm] represents a flow rate of a silane-based deposition gas,
wherein PW [W] is 85 or less, and
wherein P [Pa] is 100 or less.
11 . The method for manufacturing a semiconductor device, according to claim 10 , further comprising:
removing part of the island-shaped conductor, thereby exposing the island-shaped oxide semiconductor,
wherein the insulator is deposited in an exposed region of the island-shaped oxide semiconductor.
12 . The method for manufacturing a semiconductor device, according to claim 11 , further comprising:
depositing a metal oxide film over and in contact with the island-shaped conductor.
13 . The method for manufacturing a semiconductor device, according to claim 12 , wherein the metal oxide film inhibits diffusion of hydrogen and impurities.
14 . The method for manufacturing a semiconductor device, according to claim 12 , wherein the metal oxide film is an insulating film.
15 . The method for manufacturing a semiconductor device, according to claim 10 , wherein the oxide semiconductor is an In—Ga—Zn oxide.
16 . The method for manufacturing a semiconductor device, according to claim 10 , wherein the conductor comprises nitrogen.
17 . The method for manufacturing a semiconductor device, according to claim 10 , wherein P [Pa] is 40 or less.
18 . The method for manufacturing a semiconductor device, according to claim 10 , further comprising:
removing part of the insulator and part of the island-shaped conductor, thereby exposing the island-shaped oxide semiconductor.