Film-based one-time-programmable memory cells in device metallization layers and back-end of line methods of manufacturing thereof
View Patent ↗A memory device includes an array having a plurality of one-time-programmable (OTP) memory cells on a side of a substrate, a plurality of word lines (WLs), a plurality of bit lines (BLs), and a plurality of control gate (CG) lines. Each of the OTP memory cells includes a first fuse resistor, a second fuse resistor, a first transistor, and a second transistor. The first and the second fuse resistors are connected to a corresponding one of the BLs, while the first and the second transistors are respectively gated by a first one and a second one of the CG lines. The first transistor, the second transistor, the first fuse resistor, and the second fuse resistor are respectively formed in a first one, a second one, a third one, and a fourth one of a plurality of metallization layers disposed on the side of the substrate.
1 . A memory device, comprising:
an array comprising a plurality of one-time-programmable (OTP) memory cells on one side of a substrate;
a plurality of word lines (WLs); a plurality of bit lines (BLs); and
a plurality of control gate (CG) lines;
wherein each of the OTP memory cells comprises a first fuse resistor, a second fuse resistor, a first transistor, and a second transistor,
wherein the first fuse resistor and the second fuse resistor are connected to a corresponding one of the BLs, while the first transistor and the second transistor are gated by a first one and a second one of the CG lines, respectively, and
wherein the first transistor, the second transistor, the first fuse resistor, and the second fuse resistor are formed in a first one, a second one, a third one, and a fourth one of a plurality of metallization layers disposed on the side of the substrate, respectively.
2 . The memory device of claim 1 , wherein the first one, the second one, the third one, and the fourth one of the plurality of metallization layers are on the one side of the side of the substrate, and wherein the first one and the second one of the plurality of metallization layers are formed of the same materials and made in identical dimensions to each other.
3 . The memory device of claim 2 , wherein the first one and the second one of the plurality of metallization layers are different from the third one and the fourth one of the plurality of metallization layers.
4 . The memory device of claim 1 , wherein the OTP memory cells are arranged in a plurality of columns and a plurality of rows, each of the rows including a corresponding one of the WLs, and each of the columns including a corresponding one of the BLs and a corresponding pair of the CG lines.
5 . The memory device of claim 1 , wherein each of the OTP memory cells further comprises a third transistor and a fourth transistor on a surface comprising an active region of the side of the substrate, and wherein the third and fourth transistors are commonly gated by a corresponding one of the WLs.
6 . The memory device of claim 5 , wherein the first fuse resistor, the first transistor, and the third transistor are connected in series between the corresponding BL and a power rail that carries a supply voltage, and wherein the second fuse resistor, the second transistor, and the fourth transistor are connected in series between the corresponding BL and the power rail.
7 . The memory device of claim 1 , wherein each of the OTP memory cells further comprises a third transistor on a surface comprising an active region of the side of the substrate, and wherein the third transistor is gated by a corresponding one of the WLs.
8 . The memory device of claim 7 , wherein the first fuse resistor, the first transistor, and the third transistor are connected in series between the corresponding BL and a power rail that carries a supply voltage, and wherein the second fuse resistor, the second transistor, and the third transistor are connected in series between the corresponding BL and the power rail.
9 . The memory device of claim 1 , wherein each of the OTP memory cells is configured to permanently present a logic state based on whether the first fuse resistor or the second fuse resistor is randomly blown.
10 . The memory device of claim 9 , wherein the logic state is identified based on activating one of the first transistor or the second transistor.
11 . A memory device, comprising:
a memory cell that is on one side of a side of a substrate and comprises:
a first fuse resistor;
a second fuse resistor;
a first transistor connected to the first fuse resistor in series; and
a second transistor connected to the second fuse resistor in series,
wherein the memory cell is configured to randomly present a first logic state when the first fuse resistor is blown, or a second logic state when the second fuse resistor is blown, and
wherein the first transistor, the second transistor, the first fuse resistor, and the second fuse resistor are formed in a first one, a second one, a third one, and a fourth one of a plurality of metallization layers disposed on the side of the substrate, respectively.
12 . The memory device of claim 11 , wherein the first one, the second one, the third one, and the fourth one of the plurality of metallization layers are on the side of the substrate, wherein the first one and the second one of the plurality of metallization layers are formed of the same materials and made in identical dimensions to each other, and wherein either the first logic state or the second logic state functions as a bit of a Physically Unclonable Function (PUF) signature for the memory cell.
13 . The memory device of claim 11 , wherein the memory cell further comprises:
a third transistor connected to the first transistor in series; and
a fourth transistor connected to the second transistor in series, wherein the third transistor and the fourth transistor are on a surface comprising an active region of the side of the substrate.
14 . The memory device of claim 13 , wherein the third and fourth transistors are concurrently activated and the first and second transistors are concurrently activated, when programming the memory cell to randomly blow the first fuse resistor or the second fuse resistor.
15 . The memory device of claim 13 , wherein the third and fourth transistors are concurrently activated and only one of the first or second transistors is activated, when reading the memory cell to identify the first or second logic state.
16 . The memory device of claim 11 , wherein the memory cell further comprises:
a third transistor connected to each of the first transistor and the second transistor in series, wherein the third transistor is on a surface comprising an active region of the side of the substrate.
17 . The memory device of claim 16 , wherein the third transistor is activated and the first and second transistors are concurrently activated, when programming the memory cell to randomly blow the first fuse resistor or the second fuse resistor.
18 . The memory device of claim 16 , wherein the third transistor is activated and only one of the first or second transistors is activated, when reading the memory cell to identify the first or second logic state.
19 . A method for fabricating a semiconductor device, comprising:
forming a first and a second word line transistors along a surface comprising an active region on a side of a substrate;
forming a first one of a plurality of metallization layers disposed over the first and the second word line transistors, wherein the first and the second word line transistors are commonly gated and commonly connected to a power rail;
forming a second one of the plurality of metallization layers over the first one of the plurality of metallization layers;
forming a first and a second control gate transistors in the second one of the plurality of metallization layers, wherein the first and the second control gate transistors are respectively gated;
forming a third one of the plurality of metallization layers over the first one of the plurality of metallization layers; and
forming a first and a second fuse resistors in the third one of the plurality of metallization layers, wherein the first fuse resistor is connected between the first control gate transistor and a bit line, and wherein the second fuse resistor is connected between the second control gate transistor and the bit line.
20 . The method of claim 19 , wherein the second one of the plurality of metallization layers is between the substrate and the third one of the plurality of metallization layers.