Granted Patent
B2
US 12,721,072 · App. 18/582,983 · Granted Aug 25, 2026
Processing method of bonded wafer
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Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Feb 21, 2024
From: TANAKA, HAYATO; IGA, HAYATO
To: DISCO CORPORATION
Reel/Frame 066512/0795 →
Priority Claims (1)
JP 2023-032487
· Mar 3, 2023
· national
Continuity (1)
References Cited (13)
US 20010007812A1
· Naoi
· 2001
[cited by examiner]
US 20190201675A1
· Miller
· 2019
[cited by examiner]
US 20220065792A1
· Hong
· 2022
[cited by examiner]
US 20230054570A1
· Sakamoto
· 2023
[cited by examiner]
JP 2010225976A
· 2010
[cited by applicant]
JP 2016096295A
· 2016
[cited by applicant]