Processes to deposit amorphous-silicon etch protection liner
Embodiments of the present disclosure generally relate to fabricating electronic devices, such as memory devices. In one or more embodiments, a microelectronic device is provided and includes a film stack disposed on a substrate and a patterned hard mask disposed on an upper surface of the film stack. The film stack has a stack thickness and contains a plurality of alternating layers of oxide layers and nitride layers. The microelectronic device also includes a plurality of openings having a depth disposed between a plurality of structures, each structure has a sidewall and each opening has a bottom, the depth is less than the stack thickness, and each opening has an aspect ratio of greater than 50 relative to the depth. The microelectronic device also includes an etch protection liner disposed on the patterned hard mask and the sidewalls.
1 . A microelectronic device, comprising:
a film stack disposed on a substrate, wherein the film stack has a stack thickness and comprises a plurality of alternating layers of oxide layers and nitride layers;
a patterned hard mask disposed on an upper surface of the film stack;
a plurality of openings having a depth disposed between a plurality of structures, wherein each structure has a sidewall and each opening has a bottom, wherein the depth is less than the stack thickness, and wherein each opening has an aspect ratio of greater than 50 relative to the depth; and
an etch protection liner disposed on the patterned hard mask and the sidewalls.
2 . The microelectronic device of claim 1 , wherein each opening has an aspect ratio of greater than 100 to about 500 relative to the depth.
3 . The microelectronic device of claim 1 , wherein a thickness of the etch protection liner deposited on the bottoms of the openings is less than a thickness of the etch protection liner deposited on the sidewalls of the structures.
4 . The microelectronic device of claim 1 , wherein the etch protection liner has a thickness of about 1 nm to about 100 nm.
5 . The microelectronic device of claim 1 , wherein the etch protection liner has a thickness of about 2 nm to about 20 nm.
6 . The microelectronic device of claim 1 , wherein the stack thickness is in a range of about 0.5 μM to about 20 μM.
7 . The microelectronic device of claim 1 , wherein the stack thickness is in a range of about 1 μM to about 10 μM.
8 . The microelectronic device of claim 1 , wherein the plurality of alternating layers of oxide layers and nitride layers comprises about 20 pairs to about 200 pairs of oxide layers and nitride layers.
9 . The microelectronic device of claim 1 , wherein the plurality of alternating layers of oxide layers and nitride layers comprises about 30 pairs to about 120 pairs of oxide layers and nitride layers.
10 . The microelectronic device of claim 1 , wherein the oxide layers comprise silicon oxide and the nitride layers comprise silicon nitride.
11 . The microelectronic device of claim 1 , wherein each of the openings independently has a width of about 1 nm to about 3,000 nm.
12 . The microelectronic device of claim 1 , wherein the etch protection liner is further disposed on the bottom of each opening.
13 . The microelectronic device of claim 1 , wherein the etch protection liner comprises amorphous-silicon.
14 . A microelectronic device, comprising:
a film stack disposed on a substrate, wherein the film stack has a stack thickness and comprises a plurality of alternating layers of oxide layers and nitride layers, wherein the plurality of alternating layers of oxide layers and nitride layers comprises about 30 pairs to about 120 pairs of oxide layers and nitride layers, and wherein the oxide layers comprise silicon oxide and the nitride layers comprise silicon nitride;
a patterned hard mask disposed on an upper surface of the film stack;
a plurality of openings having a depth disposed between a plurality of structures, wherein each structure has a sidewall and each opening has a bottom, wherein the depth is less than the stack thickness, and wherein each opening has an aspect ratio of greater than 50 relative to the depth; and
an etch protection liner comprising amorphous-silicon and disposed on the patterned hard mask and the sidewalls.
15 . The microelectronic device of claim 14 , wherein the etch protection liner is further disposed on the bottom of each opening.
16 . A microelectronic device, comprising:
a film stack disposed on a substrate, wherein the film stack has a stack thickness and comprises a plurality of alternating layers of oxide layers and nitride layers, and wherein the oxide layers comprise silicon oxide and the nitride layers comprise silicon nitride;
a patterned hard mask disposed on an upper surface of the film stack;
a plurality of holes having a depth disposed between a plurality of structures, wherein each structure has a sidewall and each of the holes has a bottom, wherein each of the holes has an aspect ratio of greater than 50 relative to the depth; and
an etch protection liner disposed on the patterned hard mask and the sidewalls.
17 . The microelectronic device of claim 16 , wherein each of the holes independently have a width of about 1 nm to about 3,000 nm.
18 . The microelectronic device of claim 16 , wherein each of the holes has an aspect ratio of greater than 100 to about 500 relative to the depth.
19 . The microelectronic device of claim 16 , wherein the depth is in a range of about 1 μM to about 10 μM.
20 . The microelectronic device of claim 16 , wherein each of the holes is a memory hole or a word line slit.