Granted Patent B2

US 12,744,184 · App. 19/055,883 · Granted Sep 22, 2026

Inventors: Gideon Van Zyl (Fort Collins, CO); Thomas Joel Blackburn (Fort Collins, CO)

Assignee: Advanced Energy Industries, Inc.

H01J37/32146H01J37/32183H01J37/32357H01J37/32697H01J2237/332H01J2237/334

Abstract

Claims (45)

1 . A method comprising:

receiving a first synchronization signal;

producing a first sequence of waveforms in response to the first synchronization signal;

receiving a second synchronization signal; and

producing a second sequence of waveforms in response to the second synchronization signal, wherein the second sequence of waveforms is different than the first sequence of waveforms;

wherein each of the waveforms in the first sequence and the second sequence comprises a first portion that changes toward a positive voltage, a second portion comprising a peak voltage, a third portion comprising a negative voltage swing, and a fourth portion comprising a negative voltage ramp.

2 . The method of claim 1 , wherein the first sequence comprises a waveform with a first negative voltage swing and a waveform with a second negative voltage swing.

3 . The method of claim 2 , comprising:

receiving a waveform dataset defining the first negative voltage swing and the second negative voltage swing.

4 . The method of claim 2 , wherein the second sequence comprises a waveform with a third negative voltage swing and a waveform with fourth negative voltage swing.

5 . The method of claim 3 , comprising:

sending the first and second synchronization signals from a source generator;

wherein receiving the first and second synchronization signals comprises receiving the first and second synchronization signals at a bias supply, wherein the bias supply produces the first and second sequences of waveforms;

wherein receiving the waveform dataset defining the first negative voltage swing and a waveform with second negative voltage swing comprises receiving the waveform dataset at the bias supply.

6 . The method of claim 5 , wherein the sending the first and second synchronization signals from a source generator comprises sending the first and second synchronization signals responsive to a power output of the source generator changing.

7 . The method of claim 2 , comprising:

sending the first and second synchronization signals from a system controller;

wherein receiving the first and second synchronization signals comprises receiving the first and second synchronization signals at a bias supply, wherein the bias supply produces the first and second sequences of waveforms.

8 . A non-transitory medium for storing instructions that are executable by a processor and/or provide configuration data for a field programmable gate array, the instructions comprising instructions for:

receiving a first synchronization signal;

producing a first sequence of waveforms in response to the first synchronization signal;

receiving a second synchronization signal; and

producing a second sequence of waveforms in response to the second synchronization signal, wherein the second sequence of waveforms is different than the first sequence of waveforms;

wherein each of the waveforms in the first sequence and the second sequence comprises a first portion that changes toward a positive voltage, a second portion comprising a peak voltage, a third portion comprising a negative voltage swing, and a fourth portion comprising a negative voltage ramp.

9 . The non-transitory medium for storing instructions of claim 8 , wherein the first sequence comprises a waveform with a first negative voltage swing and a waveform with second negative voltage swing.

10 . The non-transitory medium for storing instructions of claim 9 , comprising:

receiving a waveform dataset defining the first negative voltage swing and the second negative voltage swing.

11 . The non-transitory medium for storing instructions of claim 9 , wherein the second sequence comprises a waveform with a third negative voltage swing and a waveform with fourth negative voltage swing.

12 . The non-transitory medium for storing instructions of claim 10 , wherein receiving the waveform dataset defining the first negative voltage swing and a waveform with second negative voltage swing comprises receiving the waveform dataset at a bias supply.

13 . A bias supply comprising:

circuitry configured produce waveforms, wherein each waveform comprises a first portion that changes toward a peak voltage, a second portion comprising the peak voltage, a third portion comprising a negative voltage swing, and a fourth portion comprising a negative voltage ramp;

synchronization logic configured to:

receive a first synchronization signal and control the circuitry to produce a first sequence of waveforms in response to the first synchronization signal; and

receive a second synchronization signal and control the circuitry to produce a first sequence of waveforms in response to the first synchronization signal.

14 . The bias supply of claim 13 comprising:

wherein the first sequence comprises a waveform with a first negative voltage swing and a waveform with second negative voltage swing.

15 . The bias supply of claim 14 , wherein the synchronization logic is configured to receive a waveform dataset defining the first negative voltage swing and the second negative voltage swing.

16 . The bias supply of claim 15 , wherein the circuitry comprises:

a first node;

at least one switch that couples a second node to the first node via a first conductive path, and responsive to the at least one switch being closed, the peak voltage is produced at the first node before the negative voltage swing.

17 . The bias supply of claim 16 , wherein the circuitry comprises:

a power supply coupled between the first node and a third node to provide a voltage between the first node and the second node;

a first switch that couples the second node to the first node, and responsive to the first switch being closed, the peak voltage is applied at the first node; and

a second switch that couples a third node to the first node, and responsive to the second switch being closed, the negative voltage swing is applied to the first node.

18 . The bias supply of claim 17 , wherein the first switch and the second switch are configured so both the first switch and the second switch are not closed at the same time.

Assignments (1)

Continuity (5)

References Cited (90)