Planar vertical resistor and bond pad resistor
View Patent ↗Resistors that avoid the problems of miniaturization of semiconductor devices and a related method are disclosed. In one embodiment, a resistor includes a planar resistor material that extends vertically within at least one metal layer of a semiconductor device. In another embodiment, a resistor includes a resistor material layer extending between a first bond pad and a second bond pad of a semiconductor device. The two embodiments can be used alone or together. A related method for generating the resistors is also disclosed.
1. A resistor for a semiconductor device, the resistor comprising:
a planar resistor material extending vertically within at least one metal layer and extending vertically from a first metal terminal in a first metal layer to a second metal terminal in a second metal layer, wherein the planar resistor material includes a non-conductive core extending vertically from the first metal terminal in the first metal layer to the second metal terminal in the second metal layer.
2. The resistor of claim 1 , wherein the planar resistor material vertically extends through at least one other metal layer.
3. The resistor of claim 1 , wherein the planar resistor material terminates in a first metal layer and at a polyconductor layer.
4. The resistor of claim 1 , wherein the planar resistor material extends from a last metal layer to a first bond pad.
5. The resistor of claim 4 , wherein the resistor further comprises a resistor material layer extending between the first bond pad and a second bond pad.
6. The resistor of claim 5 , wherein the planar resistor material and the resistor material layer are interconnected.
7. The resistor of claim 5 , further comprising an insulator layer extending over the resistor material layer between the first bond pad and the second bond pad.
8. The resistor of claim 1 , wherein the non-conductive core is selected from the group consisting of a dielectric material and an organic material.
9. The resistor of claim 1 , wherein a value of a resistance of the planar resistor material is determined by a height of the planar resistor material.
10. A resistor comprising:
a resistor material layer extending between a first bond pad and a second bond pad of a semiconductor device; and
a planar resistor material extending vertically within at least one metal layer and extending vertically from a first metal terminal in a first metal layer to a second metal terminal in a second metal layer of the semiconductor device, wherein the planar resistor material includes a non-conductive core extending vertically from the first metal terminal in the first metal layer to the second metal terminal in the second metal layer.
11. The resistor of claim 10 , further comprising an insulator layer extending over the resistor material layer between the first bond pad and the second bond pad.
12. The resistor of claim 10 , wherein the resistor material layer and the planar resistor material are interconnected.
13. The resistor of claim 10 , wherein the planar resistor material vertically extends through at least one other metal layer.
14. The resistor of claim 10 , wherein the planar resistor material terminates at a polyconductor layer.