Compliant multi-composition interconnects
View Patent ↗A compliant interconnect with two or more layers of metal of two or more compositions with internal stresses is described herein.
1. A compliant interconnect comprising:
a first metal layer of a first metal composition having a first thickness and a first amount of internal stress;
a second metal layer of a second metal composition, stacked on top of the first metal layer, the second metal layer having a second thickness and a second amount of internal stress, the second amount of internal stress being different from the first amount of internal stress, and wherein the second internal stresses is compressive stress; and
the compliant interconnect having a concave shape with the first metal layer being on a concave side therof, the first amount of internal stress being of a greater compressive value relative to that of the second amount of internal stress.
2. The compliant interconnect of claim 1 , wherein at least a selected one of the first and second metal composition comprises a selected one of (Al, Cu, Ti, Ni, Au, Ag, Sn, Ta, Mo, Cr and Co).
3. The compliant interconnect of claim 1 , further comprising a third layer having third amount of internal stress being different from at least one of the first and second amounts of internal stress.
4. A system comprising:
a component having;
a substrate including a metal pad;
a passivation layer disposed on the substrate, including an opening exposing the metal pad;
a compliant interconnect disposed on a portion of the or passivation layer and the metal pad, the compliant interconnect having at least a first metal layer of a first metal composition with a first thickness and having a first amount of internal stress, and a second metal layer of a second metal composition, stacked on top of the first layer, with a second thickness and having a second amount of internal stress, wherin the second amount of internal stress is different from the first amount of internal stress, the second internal stress is a compressive stress, and the compliant interconnect having a concave shape with the first metal layer being on a concave side therof, the first amount of internal stress being of a relatively greater compressive value than that the second amount of internal stress;
a bus coupled to the component; and
a networking interface coupled to the bus.
5. The system of claim 4 , wherein the component is a selected one of a microprocessor and a chipset.
6. The system of claim 4 , wherein at least a selected one of the first and second metal composition of the compliant interconnect of the component comprises a selected one of (Al, Cu, Ti, Ni, Au, Ag, Sn, Ta, Mo, Cr and Co).
7. The system of claim 4 , wherein said system is selected from the group comprising of a mobile phone, a DVD player, a digital camera, and a set-top box.
8. An apparatus comprising:
a substrate including a metal pad;
a passivation layer disposed on said substrate, including an opening exposing the metal pad;
a polymer dome formed on said dielectric layer at one side of said opening; and
a compliant interconnect disposed on a portion of said substrate and on said metal pad and on at least a portion of said polymer dome, the compliant interconnect having:
a first metal layer of a first metal composition with a first thickness and having a first amount of internal stress; and
a second metal layer of a second metal composition stacked on top of the first layer, with a second thickness and having a second amount of internal stress.
9. The apparatus of claim 8 , wherein at least a selected one of the first and second internal stresses of the first and second metal layers of the compliant interconnect is compressive stress.
10. The apparatus of claim 8 , wherein at least a selected one of the first and second internal stresses of the first and second metal layers of the compliant interconnect is tensile stress.
11. The apparatus of claim 8 , wherein the apparatus is a microprocessor.