IP Library Granted Patent US 7,482,197
Granted Patent B2
US 7,482,197 · App. 11/220,878 · Granted Jan 27, 2009

Method and apparatus for deploying a liquid metal thermal interface for chip cooling

Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 7,482,197
App. No.
11/220,878
Filed
Sep 6, 2005
Granted
Jan 27, 2009
Kind
B2
Examiner
NHU, DAVID
Art Unit
2895
USPC
438/612
Abstract

In one embodiment, the present invention is a method and apparatus for chip cooling. One embodiment of an inventive method for bonding a liquid metal to an interface surface (e.g., a surface of an integrated circuit chip or an opposing surface of a heat sink) includes applying an adhesive to the interface surface. A metal film is then bonded to the adhesive, thereby easily adapting the interface surface for bonding to the liquid metal.

Claims (35)

1. A method for adapting an interface surface for bonding to a liquid metal, the interface surface comprising a surface of an integrated circuit chip or a surface of a heat sink, said method comprising:

applying an adhesive to said interface surface; and

bonding a metal film to said adhesive, where said metal film is for bonding said liquid metal to said interface surface, wherein said bonding comprises:

pressing said metal film to said adhesive, said metal film comprising:

a barrier layer, said barrier layer comprising a substantially oxide-free foil that has a low solubility in said liquid metal; and

a wetting layer, said wetting layer comprising at least one material that is at least partially dissolvable in said liquid metal and that coats at least a portion of said barrier layer; and

curing said adhesive until said metal film is bonded to said adhesive.

2. The method of claim 1 , wherein said barrier layer is formed of at least one of: titanium, tantalum, tungsten, chromium, molybdenum, silicon, silicon carbide, silicon nitride, silicon dioxide, titanium nitride, tantalum nitride or nickel.

3. The method of claim 1 , wherein said wetting layer is formed of at least one noble metal.

4. The method of claim 1 , wherein said wetting layer is formed of at least one of: platinum or gold.

5. The method of claim 1 , wherein said metal film has a thickness of at least approximately 1000 Angstroms.

6. A method for adapting an interface surface for bonding to a liquid metal, the interface surface comprising a surface of an integrated circuit chip or a surface of a heat sink, said method comprising:

applying an adhesive to said interface surface; and

bonding a metal film to said adhesive, where said metal film is for bonding said liquid metal to said interface surface, wherein said bonding comprises:

pressing said metal film to said adhesive, said metal film comprising:

a polymer backing film; and

a barrier layer evaporated onto said polymer backing film, said barrier layer comprising at least one material that has a low solubility in said liquid; and

curing said adhesive until said metal film is bonded to said adhesive.

7. The method of claim 6 , wherein said metal film further comprises:

a wetting layer evaporated onto said polymer backing film beneath said barrier layer, said wetting layer comprising at least one material that is at least partially dissolvable in said liquid metal.

8. The method of claim 6 , wherein said bonding further comprises:

peeling said polymer backing film from said metal film after curing said adhesive.

9. The method of claim 6 , wherein said polymer backing film is formed of a polyester film.

10. The method of claim 6 , wherein said metal film has a thickness of approximately one to twenty microns.

11. The method of claim 6 , wherein said polymer backing film is formed of at least one of: polyethylene terephthalate or polytetrafluoroethylene.

12. The method of claim 1 , wherein said adhesive is at least one of: a low viscosity acrylate, an epoxy, a low-melt solder or an indium-based solder.

13. The method of claim 1 , further comprising:

applying an adhesion promoter to said interface surface prior to applying said adhesive.

14. The method of claim 1 , wherein said adhesive is cured using at least one of: heat and light.

15. The method of claim 14 , wherein said adhesive is cured at a temperature of at least approximately 250 degrees Celsius.

16. The method of claim 6 , wherein said adhesive is at least one of: a low viscosity acrylate, an epoxy, a low-melt solder or an indium-based solder.

17. The method of claim 6 , further comprising:

applying an adhesion promoter to said interface surface prior to applying said adhesive.

18. The method of claim 6 , wherein said adhesive is cured using at least one of: heat and light.

19. The method of claim 18 , wherein said adhesive is cured at a temperature of at least approximately 250 degrees Celsius.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 26, 2005
From: FURMAN, MR. BRUCE K.; MARTIN, MR. YVES C.; VAN KESSEL, MR. THEODORE G.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 016687/0311 →
Continuity (3)
Provisional Application 6063710000 · Dec 17, 2004
Provisional Application 6063711700 · Dec 17, 2004
Related Publication 20070238282A1 · Oct 11, 2007