Vertical transistor structure and method of manufacturing same
A vertical transistor structure includes a substrate, a plurality of pillars located on the substrate and spaced from each other at a selected distance, a gate line and a plurality of conductors. The pillars are aligned in a straight line in a first direction and have respectively a primary control wall along the first direction and two ancillary control walls perpendicular to the primary control wall. The gate line is connected to the primary control wall in the first direction through a first isolated layer. The conductors are interposed between the ancillary control walls through second isolated layers. By providing the gate line merely on the primary control wall and the conductors to aid the gate line to control ON/OFF of the pillars, problems of etching and separating gate material during gradually shrunken feature size process that are difficult to control etching positions and etching duration can be prevented.
1. A vertical transistor structure, comprising:
a substrate;
a plurality of pillars located on the substrate and spaced from each other at a selected distance and aligned in a straight line in a first direction, each of the plurality of pillars including a primary control wall along the first direction and two ancillary control walls perpendicular to the primary control wall;
a gate line being parallel with the substrate to connect the primary control walls of the plurality of pillars through first isolated layers in the first direction; and
a plurality of conductors connecting to the gate line and being interposed between the ancillary control walls through second isolated layers,
wherein the gate line and the substrate are spaced at a distance greater than a distance between the plurality of conductors and the substrate.
2. The vertical transistor structure of claim 1 , wherein the substrate includes a plurality of bit lines perpendicular to the first direction and corresponding to the pillars.
3. The vertical transistor structure of claim 2 , wherein the plurality of bit lines are formed on a surface of the substrate by ion implantation.
4. The vertical transistor structure of claim 1 , wherein the pillar is coupled with a capacitor at one end remote from the substrate.