IP Library › Granted Patent US 8,682,128
Granted Patent B2
US 8,682,128 · App. 12/195,565 · Granted Mar 25, 2014

Optical waveguide with periodic sub-wavelength sized regions

Inventor: Thilo H. C. Stoeferle (Zurich, CH)
Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 8,682,128
App. No.
12/195,565
Granted
Mar 25, 2014
Kind
B2
Abstract

A guiding element suitable for integrated optics and transmission in the visible wavelength region includes a plurality of sub-wavelength sized regions in two parallel periodic arrangements embedded within a waveguide layer located on a planar substrate. The dielectric constant of each regions may be the same but different from that of the substrate, the waveguide layer, and the cladding. The periodicity, dimensions and shape of the regions of the periodic arrangement are selected to achieve the desired transmission and guiding of the incident radiation spectrum (e.g., parallel to the two periodic arrangements). A transparent layer with a dielectric constant between the dielectric constant of the periodic arrangement and the dielectric constant of the substrate/cladding provides confinement normal to the substrate.

Claims (26)

1. An optical waveguide, comprising:

a substrate comprising a dielectric material having a dielectric constant ∈ 1 ;

a waveguide layer disposed on and in contact with the substrate, the waveguide layer having a dielectric constant ∈ 2 ;

a plurality of sub-wavelength sized regions embedded within the waveguide layer, wherein the plurality of regions are arranged in a pair of curved parallel rows defining a space therebetween filled by a material of the waveguide layer, wherein each of the regions has a dielectric constant ∈ 4 , the dielectric constant ∈ 4 of each of the regions is greater than the dielectric constant of the waveguide layer ∈ 2 , and wherein destructive interference of the electromagnetic radiation propagating within the waveguide layer with the plurality of sub-wavelength sized regions allows the electromagnetic radiation to change a propagation direction in the optical waveguide along a curved path defined by the curved parallel rows; and

a cladding layer disposed over and in contact with the plurality of sub-length sized regions and the waveguide layer, the cladding layer having a dielectric constant ∈ 3 that is less than the dielectric constant ∈ 4 of each of the regions of the plurality of sub-wavelength sized regions and the dielectric constant ∈ 2 of the waveguide layer.

2. The optical waveguide of claim 1 , wherein the substrate comprises an oxide material.

3. The optical waveguide of claim 1 , wherein the substrate comprises SiO 2 .

4. The optical waveguide of claim 1 , wherein the waveguide layer comprises a polymer material.

5. The optical waveguide of claim 1 , wherein the cladding layer comprises air.

6. The optical waveguide of claim 1 , wherein the cladding layer comprises an oxide material.

7. The optical waveguide of claim 1 , wherein the cladding layer comprises SiO 2 .

8. The optical waveguide of claim 1 , wherein the dielectric constant ∈ 1 is less than the dielectric constant ∈ 4 and the dielectric constant ∈ 2 .

9. The optical waveguide of claim 1 , wherein the each of the of sub-wavelength sized regions of the plurality of sub-wavelength sized regions embedded within the waveguide layer comprise a semiconductor material.

10. The optical waveguide of claim 1 , wherein the each of the of sub-wavelength sized regions of the plurality of sub-wavelength sized regions embedded within the waveguide layer comprise a silicon.

11. The optical waveguide of claim 1 , wherein the parallel rows of regions are angled with respect to an original propagation direction of the electromagnetic radiation and a final propagation direction of the electromagnetic radiation.

12. An optical waveguide, comprising:

a substrate comprising an oxide material having a dielectric constant ∈ 1 ;

a waveguide layer comprising a polymer material disposed on and in contact with the substrate, the waveguide layer having a dielectric constant ∈ 2 ;

a plurality of sub-wavelength sized regions comprising a semiconductor material embedded within the waveguide layer, wherein the plurality of regions are arranged in a pair of curved parallel rows defining a space therebetween filled with the polymer material, wherein each of the regions has a dielectric constant ∈ 4 , the dielectric constant ∈ 4 of each of the regions is greater than the dielectric constant of the waveguide layer ∈ 2 , and wherein electromagnetic radiation propagating within the waveguide layer uses the curved parallel rows of regions to change a propagation direction of the electromagnetic radiation in the optical waveguide along a curved path defined by the curved parallel rows; and

a cladding layer disposed over and in contact with the plurality of sub-length sized regions and the waveguide layer, the cladding layer having a dielectric constant ∈ 3 that is less than the dielectric constant ∈ 4 of each of the regions of the plurality of sub-wavelength sized regions and the dielectric constant ∈ 2 of the waveguide layer.

13. The optical waveguide of claim 12 , wherein the oxide material of the substrate comprises SiO 2 .

14. The optical waveguide of claim 12 , wherein the cladding layer comprises air.

15. The optical waveguide of claim 12 , wherein the cladding layer comprises an oxide material.

16. The optical waveguide of claim 12 , wherein the cladding layer comprises SiO 2 .

17. The optical waveguide of claim 12 , wherein the semiconductor material of each of the of sub-wavelength sized regions of the plurality of sub-wavelength sized regions embedded within the waveguide layer comprise a silicon.

18. The optical waveguide of claim 12 , wherein the dielectric constant ∈ 1 is less than the dielectric constant ∈ 4 and the dielectric constant ∈ 2 .

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ADDRESS OF THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 021421 FRAME 0723. ASSIGNOR(S) HEREBY CONFIRMS THE ADDRESS OF THE ASSIGNEE AS INTERNATIONAL BUSINESS MACHINES CORPORATION, NEW ORCHARD ROAD, ARMONK, NEW YORK 10504. Recorded Oct 16, 2008
From: STOEFERLE, THILO H.C.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 021689/0069 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 21, 2008
From: STOEFERLE, THILO H. C.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 021421/0723 →
Continuity (1)
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