IP Library Granted Patent US 8,828,278
Granted Patent B2
US 8,828,278 · App. 12/995,078 · Granted Sep 9, 2014

Electroplating additive for the deposition of metal, a binary, ternary, quaternary or pentanary alloy of elements of group 11 (IB)—group 13 (IIIA)—Group 16 (VIA)

Inventors: Torsten Voss (Glienicke/Nordbahn, DE); Jöerg Schulze (Oranienburg, DE); Andreas Kirbs (Potsdam, DE); Aylin Machmor (Riedstadt, DE); Heiko Brunner (Berlin, DE); Bernd Fröese (Berlin, DE); Ulrike Engelhardt (Ketsch, DE)
Assignee: Atotech Deutschland GmbH
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Quick Facts
Patent No.
US 8,828,278
App. No.
12/995,078
Granted
Sep 9, 2014
Kind
B2
Abstract

The invention relates to electroplating additives for the deposition of a group IB metal/binary or ternary group IB-group IIIA/ternary, quaternary or pentanary group IB-group IIIA-group VIA alloy on substrates useful for thin film solar cells. The additives are thiourea compounds or derivatives which have the general formula (A): wherein X 1 and X 2 may be the same or different and are selected from the group consisting of arylene and heteroarylene; FG 1 and FG 2 may be the same or different or are selected from the group consisting of —S(O) 2 OH, —S(O)OH, —COOH, —P(O) 2 OH and primary, secondary and tertiary amino groups and salts and esters thereof; R is selected from the group consisting of alkylene, arylene or heteroarylene and n and m are integers from 1 to 5.

Claims (38)

1. A process for coating a substrate with a binary or ternary group IB-group IIIA/ternary, quaternary or pentanary group IB-group IIIA-group VIA alloy comprising the following steps:

(i) pre-cleaning the substrate to be coated and

(ii) contacting the pre-cleaned substrate with a metal plating composition comprising an additive of the general formula (A) in a concentration range from 1 to 500 ppm:

wherein X 1 and X 2 may be the same or different and are selected from the group consisting of arylene and heteroarylene;

FG 1 and FG 2 may be the same or different and are selected from the group consisting of —S(O) 2 OH, —S(O)OH, —COOH, —P(O) 2 OH and primary, secondary and tertiary amino groups and salts and esters thereof;

R is selected from the group consisting of alkylene, arylene or heteroarylene and

n and m are integers from 1 to 5; and

further comprising a group IB plating species and a group IIIA plating species, and a buffer system in an amount such that the composition has a pH value from about 1 to about 6,

at a temperature from about 15° C. to about 80° C. to obtain a substrate coated with a binary or ternary group IB-group IIIA/ternary, quaternary or pentanary group IB-group IIIA-group VIA alloy.

2. The process according to claim 1 wherein the additive is selected from the group consisting of compounds having the general formula (I) to (III):

wherein Ar 1 and Ar 2 are the same or different and independently denote an arylene group;

wherein Het 1 and Het 2 are the same or different and denote a heteroarylene group and

wherein FG 1 , FG 2 , m and n are defined as in claim 1 .

3. The process according to claim 2 wherein Ar 1 and Ar 2 denote a phenylene or naphthylene group.

4. The process according to claim 2 wherein Het 1 and Het 2 denote a pyridylene or quinolinylene group.

5. The process according to claim 2 wherein the additive has the formula

wherein n′ is 2 to 12.

6. The process according to claim 1 wherein the metal plating composition further comprises a group VIA plating species.

7. The process according to claim 1 wherein the group IB plating species comprises copper, wherein the group IIIA plating species comprises gallium and/or indium and wherein the VIA plating species comprises selenium and/or sulfur.

8. The process according to claim 7 wherein the metal plating composition comprises plating species selected from:

(i) copper plating species,

(ii) copper and indium plating species,

(iii) copper, indium and gallium plating species,

(iv) copper, indium and selenium plating species,

(v) copper, indium and sulfur plating species,

(vi) copper, indium, gallium and selenium plating species,

(vii) copper, indium, gallium and sulfur plating species and

(viii) copper, indium, gallium, selenium and sulfur plating species.

9. The process according to claim 8 wherein the copper and indium plating species are comprised in the composition in a molar ratio of copper:indium of 1:0.1-50 and wherein the copper and selenium plating species are comprised in the composition in a molar ratio of copper:selenium of 1:0.01-40.

10. The process according to claim 9 wherein the copper and indium plating species are comprised in the composition in a molar ratio of copper:indium of 1:1-5 and wherein the copper and selenium plating species are comprised in the composition in a molar ratio of copper:selenium of 1:0.05-2.

11. The process according to claim 7 wherein the copper plating species are selected from copper sulphate, copper sulfamates and copper methane sulfonates and wherein the indium plating species are selected from indium sulfamates and indium methane sulfamates.

12. The process according to claim 1 wherein the composition has a pH value from about 1.8 to about 5.

13. The process according to claim 1 wherein the composition has a pH value from about 2.5 to about 4.

14. The process according to claim 1 wherein the additive is present in a concentration range of 5 to 100 ppm.

15. The process according to claim 1 wherein the additive is present in a concentration range of 10 to 50 ppm.

16. The process according to claim 1 wherein the composition further comprises a complexing agent in an amount of 0.001 to 2 mol/l.

17. The process according to claim 16 wherein the complexing agent is present in an amount of 0.005 to 1 mol/l.

18. The process according to claim 16 wherein the complexing agent is present in an amount of 0.02 to 0.5 mol/l.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Aug 18, 2022
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ATOTECH DEUTSCHLAND GMBH & CO. KG (F/K/A ATOTECH DEUTSCHLAND GMBH); ATOTECH USA, LLC
Reel/Frame 061521/0103 →
RELEASE OF SECURITY INTEREST Recorded Mar 18, 2021
From: BARCLAYS BANK PLC, AS COLLATERAL AGENT
To: ATOTECH DEUTSCHLAND GMBH; ATOTECH USA, LLC
Reel/Frame 055653/0714 →
SECURITY INTEREST Recorded Mar 18, 2021
From: ATOTECH DEUTSCHLAND GMBH; ATOTECH USA, LLC
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 055650/0093 →
SECURITY INTEREST Recorded Feb 1, 2017
From: ATOTECH DEUTSCHLAND GMBH; ATOTECH USA INC
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 041590/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2011
From: VOSS, TORSTEN; SCHULZE, JOERG; KIRBS, ANDREAS; MACHMOR (FORMERLY SOENMEZ), AYLIN; BRUNNER, HEIKO; FROESE, BERND; ENGELHARDT, ULRIKE
To: ATOTECH DEUTSCHLAND GMBH
Reel/Frame 025607/0755 →
Priority Claims (1)
EP 08009979 · May 30, 2008 · regional
Continuity (1)
Related Publication 20110094583A1 · Apr 28, 2011