Vertically curved waveguide
An optical waveguide structure may include an optical waveguide structure located within a semiconductor structure and an optical coupler. The optical coupler may include a metallic structure located within an electrical interconnection region of the semiconductor structure, whereby the metallic structure extends downward in a substantially curved shape from a top surface of the electrical interconnection region and couples to the optical waveguide structure. The optical coupler may further include an optical signal guiding region bounded within the metallic structure, whereby the optical coupler receives an optical signal from the top surface and couples the optical signal to the optical waveguide structure such that the optical signal propagation is substantially vertical at the top surface and substantially horizontal at the optical waveguide structure.
1. A waveguide structure comprising:
an optical waveguide structure located within a semiconductor structure; and
an optical coupler including:
a metallic structure located within an electrical interconnection region of the semiconductor structure, the metallic structure extending downward in a substantially curved shape from a top surface of the electrical interconnection region and coupling to the optical waveguide structure, the metallic structure including a portion of a plurality of metallization layers and a portion of a plurality of via layers, the portion of the plurality of metallization layers interleaved with the portion of the plurality of via layers in a substantially vertically stacked configuration, and
an optical signal guiding region bounded within the metallic structure,
wherein the optical coupler receives an optical signal from the top surface and couples the optical signal to the optical waveguide structure such that the optical signal propagation is substantially vertical at the top surface and substantially horizontal at the optical waveguide structure.
2. The structure of claim 1 , wherein the optical coupler comprises a core region for guiding the optical signal.
3. The structure of claim 2 , wherein metallic structure comprises a cladding region for the core region.
4. A waveguide structure comprising:
an optical waveguide structure located within a semiconductor structure; and
an optical coupler including:
a metallic structure located within an electrical interconnection region of the semiconductor structure, the metallic structure extending downward in a substantially curved shape from a top surface of the electrical interconnection region and coupling to the optical waveguide structure, and
an optical signal guiding region bounded within the metallic structure,
wherein the optical coupler receives an optical signal from the top surface and couples the optical signal to the optical waveguide structure such that the optical signal propagation is substantially vertical at the top surface and substantially horizontal at the optical waveguide structure, wherein the metallic structure comprises:
at least one metal structure having a top metal layer located adjacent the top surface; and
at least one via structure having a bottom via layer coupled to the waveguide structure,
wherein each of the at least one metal structure is interleaved with each of the at least one via structure to form a staircase shape extending between the top surface of the electrical interconnection region and the optical waveguide structure.
5. The structure of claim 4 , wherein the at least one metal structure and the at least one via structure each comprises a thickness of about 0.25μm to about 1.0μm.
6. The structure of claim 1 , wherein the electrical interconnection region further comprises an inter layer dielectric (ILD) material.
7. The structure of claim 6 , wherein the inter layer dielectric (ILD) material comprises silicon dioxide (SiO 2 ).
8. The structure of claim 1 , wherein the optical coupler comprises a polycrystalline silicon material.
9. The structure of claim 1 , wherein the optical waveguide structure comprises a silicon waveguide.
10. The structure of claim 1 , further comprising:
an optical fiber having a core for guiding an optical signal,
wherein the optical fiber is vertically coupled to the top surface of the electrical interconnection region such that the core is aligned with a top facet of the optical coupler, the top facet being coplanar with the top surface.
11. The structure of claim 1 , wherein the optical coupler comprises a width of about 0.25μm to about 2μm.