Three-dimensional chip stack for self-powered integrated circuit
Structures and methods for self-powered devices are disclosed herein. Specifically, disclosed herein is a stacked, three-dimensional integrated circuit including a power generation die including a power source. The integrated circuit also includes a functional system die including one or more functional components that are powered by power generated by the power source. The power generation die and the functional system die are stacked in a three-dimensional structure.
1. A stacked three-dimensional integrated circuit, comprising:
a power generation die including a power source;
a power storage and control die including a power controller and one or more storage devices that store power received from the power source; and
a functional system die including one or more functional components that are powered by power generated by the power source,
wherein the power generation die and the functional system die are stacked in a three-dimensional structure.
2. The integrated circuit of claim 1 , wherein:
the power generation die is stacked on the power storage and control die; and
the power storage and control die is stacked on the functional system die.
3. The integrated circuit of claim 1 , wherein at least two of the power generation die, the power storage and control die, and the functional system die are different fabrication technologies.
4. The integrated circuit of claim 3 , wherein the different fabrication technologies include different types of wafers.
5. The integrated circuit of claim 3 , wherein the different fabrication technologies include different technology nodes.
6. The integrated circuit of claim 1 , further comprising an interconnect structure that electrically and mechanically connects the power generation die and the functional system die.
7. The integrated circuit of claim 6 , wherein the interconnect structure comprises a through-silicon via connecting an upper surface of the power generation die to an upper surface of the functional system die through one or more conductors.
8. The integrated circuit of claim 1 , wherein the power source is an energy harvesting system.
9. The integrated circuit of claim 8 , wherein the energy harvesting system is one or more of: a radiant energy power source, chemo-electric power source, a thermo-electric power source, and a MicroElectro-Mechanical System (MEMS) power source.
10. The integrated circuit of claim 1 , wherein the one or more functional components include a sensor, a processor, and a transmitter.