Semiconductor modules and methods of forming the same
Electronic modules, and methods of forming and operating modules, are described. The modules include a capacitor, a first switching device, and a second switching device. The electronic modules further include a substrate such as a DBC substrate, which includes an insulating layer between a first metal layer and a second metal layer, and may include multiple layers of DBC substrates stacked over one another. The first metal layer includes a first portion and a second portion isolated from one another by a trench formed through the first metal layer between the two portions. The first and second switching devices are over the first metal layer, a first terminal of the capacitor is electrically connected to the first portion of the first metal layer, and a second terminal of the capacitor is electrically connected to the second portion of the first metal layer, with the capacitor extending over the trench.
1. An electronic module, comprising:
a capacitor;
a first switching device comprising a first transistor, and a second switching device comprising a second transistor; and
a substrate comprising an insulating layer between a first metal layer and a second metal layer, the first metal layer including a first portion and a second portion, the second portion being electrically isolated from the first portion by a trench formed through the first metal layer between the first portion and the second portion; wherein
the first and second switching devices are over the first metal layer; and
a first terminal of the capacitor is electrically connected to the first portion of the first metal layer, and a second terminal of the capacitor is electrically connected to the second portion of the first metal layer, with the capacitor extending over the trench.
2. The electronic module of claim 1 , wherein a drain of the first transistor is electrically connected to a source of the second transistor, and the first and second transistors are both over the first portion of the first metal layer.
3. The electronic module of claim 1 , wherein
the first portion of the first metal layer comprises a DC ground lead, the DC ground lead being electrically connected to a DC ground, and
the second portion of the first metal layer comprises a DC high voltage lead, the DC high voltage lead being to electrically connected to a DC high voltage.
4. The electronic module of claim 3 , wherein the capacitor is configured to stabilize a voltage difference between the first and the second portions of the first metal layer.
5. The electronic module of claim 1 , wherein the first or second transistor is a III-Nitride transistor.
6. The electronic module of claim 5 , wherein the substrate comprises a direct bonded copper substrate.
7. The electronic module of claim 1 , further comprising a second substrate comprising a second insulating layer between a third metal layer and a fourth metal layer, the second substrate being over a third portion of the first metal layer but not being over the first and second portions of the first metal layer, wherein the second substrate is between the second transistor and the first substrate, and the first transistor is over the first or second portion of the first metal layer.
8. An electronic module, comprising:
a capacitor;
a first substrate comprising a first metal layer on a first insulating layer, the first metal layer including a first portion and a second portion, the second portion being electrically isolated from the first portion by a trench formed through the first metal layer between the first portion and the second portion;
a first terminal of the capacitor is electrically connected to the first portion of the first metal layer, and a second terminal of the capacitor is electrically connected to the second portion of the first metal layer, with the capacitor extending over the trench;
a second substrate comprising a second insulating layer between a second metal layer and a third metal layer, the second substrate having a second surface and a third surface on an opposite side of the second substrate from the second surface, the second insulating layer having a smaller area than the first insulating layer; and
a first semiconductor device; wherein
the second substrate is mounted over the first portion of the first metal layer without being over the second portion of the first metal layer, with the second surface of the second substrate directly contacting the first metal layer; and
the first semiconductor device is mounted on the third surface of the second substrate.
9. The electronic module of claim 8 , further comprising a second semiconductor device mounted on the second portion of the first metal layer.
10. The electronic module of claim 9 , wherein the first semiconductor device or the second semiconductor device is a transistor.
11. The electronic module of claim 10 , wherein the transistor comprises source, gate, and drain electrodes, each of the electrodes being on a first side of the transistor.