Granted Patent
Utility
US 6,834,656
· Confirmation No. 1872
PLASMA PROCESS FOR REMOVING POLYMER AND RESIDUES FROM SUBSTRATES
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-03-13 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-03-13 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-02-06 | PA.. |
Power of Attorney | 1 | View | |
| 2013-02-06 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2013-02-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2004-11-18 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-08-26 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-08-26 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-08-26 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-08-26 | FWCLM |
Index of Claims | 1 | View | |
| 2004-08-26 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-08-26 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-08-26 | BIB |
Bibliographic Data Sheet | 2 | View | |
| 2004-08-22 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-08-04 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2004-08-04 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-08-04 | CLM |
Claims | 5 | View | |
| 2004-08-04 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2004-08-04 | XT/ |
Extension of Time | 1 | View | |
| 2004-08-04 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View | |
| 2004-08-04 | IMIS |
Miscellaneous Internal Document | 2 | View | |
| 2004-04-13 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2004-03-29 | A.NE |
Response After Final Action | 2 | View | |
| 2004-03-29 | CLM |
Claims | 4 | View | |
| 2004-03-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2004-03-29 | AF/D |
Affidavit-submitted prior to Mar 15, 2013 | 4 | View | |
| 2004-03-29 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-02-02 | CTFR |
Final Rejection | 5 | View | |
| 2004-02-02 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-02 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-01-26 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-11-14 | XT/ |
Extension of Time | 1 | View | |
| 2003-11-04 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2003-11-04 | CLM |
Claims | 5 | View | |
| 2003-11-04 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2003-11-04 | XT/ |
Extension of Time | 2 | View | |
| 2003-07-08 | CTNF |
Non-Final Rejection | 8 | View | |
| 2003-07-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-04-25 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2003-04-25 | CLM |
Claims | 5 | View | |
| 2003-04-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-03-28 | CTNF |
Non-Final Rejection | 4 | View | |
| 2003-03-28 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-03-28 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 9 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 9 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-03-23 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2001-08-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2001-05-23 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-05-23 | SPEC |
Specification | 15 | View | |
| 2001-05-23 | CLM |
Claims | 4 | View | |
| 2001-05-23 | ABST |
Abstract | 1 | View | |
| 2001-05-23 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-05-23 | OATH |
Oath or Declaration filed | 3 | View | |
| 2001-05-23 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-05-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-05-23 | FWCLM |
Index of Claims | 1 | View | |
| 2001-05-23 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-05-23 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-05-23 | SPEC |
Specification | 15 | View | |
| 2001-05-23 | CLM |
Claims | 4 | View | |
| 2001-05-23 | ABST |
Abstract | 1 | View | |
| 2001-05-23 | OATH |
Oath or Declaration filed | 3 | View | |
| 2001-05-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-05-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-05-23 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Han Qingyuan
Columbia, MD
Carlo Waldfried
Falls Church, VA
Orlando Escorcia
Falls Church, VA
Gary Dahrooge
Germantown, MD
Ivan Berry
Ellicott City, MD
Attorneys & Agents of Record
Classification
USPC
134/1.3
H10P70/234
H10P50/287
H10P70/273
B08B7/0035
C03C15/00
C03C23/0075
C23G5/00
G03F7/427
Prosecution
- Examiner
- MARKOFF, ALEXANDER
- Art Unit
- 1746
- Customer No.
- 91286
- Docket No.
- NVLS008031
- Confirmation No.
- 1872
Publication
- Pub. No.
- US20020185151A1
- Pub. Date
- 2002-12-12
Patent Term Adjustment
-121days
No related applications found.
from
SILICON VALLEY BANK
TERMINATION OF SECURITY AGREEMENT
Recorded 2013-04-16
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-12-21
CORRECTED RECORDATION FORM COVER SHEET
Recorded 2002-01-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-23
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Quick Facts
- Patent No.
- US 6,834,656
- App. No.
- 09/864,003
- Filed
- 2001-05-23
- Granted
- 2004-12-28
- Pub. No.
- US20020185151A1
- Examiner
- MARKOFF, ALEXANDER
- Art Unit
- 1746
- PTA
- -121 days
External Links