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App. No. 10/126,326 · Confirmation No. 3157

RELACS SHRINK METHOD APPLIED FOR SINGLE PRINT RESIST MASK FOR LDD OR BURIED BITLINE IMPLANTS USING CHEMICALLY AMPLIFIED DUV TYPE PHOTORESIST

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2013-04-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-04-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-03-21 PA.. Power of Attorney 1 View
2013-03-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2013-03-21 LET. Miscellaneous Incoming Letter 1 View
2013-03-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-03-21 TRAN.LET Transmittal Letter 1 View
2009-08-18 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-08-21 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-04-19 TRNA Transmittal of New Application 3 View
2002-04-19 SPEC Specification 11 View
2002-04-19 CLM Claims 5 View
2002-04-19 ABST Abstract 1 View
2002-04-19 DRW Drawings-only black and white line drawings 7 View
2002-04-19 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/126,326
Filed
2002-04-19
Granted
2003-11-04
Examiner
TRAN, BINH X
Art Unit
1765
PTA
0 days