Granted Patent
Utility
Small
US 6,617,587
· Confirmation No. 5510
ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-03-14 | PET.AUTO |
ePetition Request Form | 3 | View | |
| 2013-03-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-03-14 | PET.DEC.AUTO |
ePetition Grant Letter | 1 | View | |
| 2013-03-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2002-11-21 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-11-21 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-09-12 | TRNA |
Transmittal of New Application | 5 | View | |
| 2002-09-12 | A.PE |
Preliminary Amendment | 3 | View | |
| 2002-09-12 | SPEC |
Specification | 50 | View | |
| 2002-09-12 | CLM |
Claims | 2 | View | |
| 2002-09-12 | ABST |
Abstract | 1 | View | |
| 2002-09-12 | DRW |
Drawings-only black and white line drawings | 23 | View | |
| 2002-09-12 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
N. William Parker
Fairfield, CA
Alan D. Brodie
Palo Alto, CA
George Xinsheng Guo
Los Altos Hills, CA
Edward M. Yin
Cupertino, CA
Michael C. Matter
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
250/396R
H01J37/3177
B82Y10/00
B82Y40/00
H01J37/3174
Prosecution
- Examiner
- BERMAN, JACK I
- Art Unit
- 2881
- Customer No.
- 23125
- Docket No.
- 58884-0293048 (MBS-0004US
- Confirmation No.
- 5510
Publication
- Pub. No.
- US20030085360A1
- Pub. Date
- 2003-05-08
Patent Term Adjustment
-35days
Parent
is a Continuation of
→
App. 09/722,079
Filed 2000-11-23
· Abandoned -- Failure to Respond to an Office Action
Parent
Claims priority from a provisional application
→
App. 60/167,442
Filed 1999-11-23
· Provisional Application Expired
Child
is a Continuation of
→
App. 10/630,349
Filed 2003-07-29
· Abandoned -- Failure to Pay Issue Fee
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS..
Recorded 2019-02-20
from
MATTER, MICHAEL C.,
GUO, GEORGE XINSHENG,
PARKER, NORMAN WILLIAM,
YIN, EDWARD M.,
BRODIE, ALAN D.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-09-05
from
CITIBANK, N.A.
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.
Recorded 2017-02-01
from
CITIBANK, N.A.
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS
Recorded 2016-01-13
PATENT RELEASE
Recorded 2015-12-21
PATENT RELEASE
Recorded 2015-12-21
PATENT RELEASE
Recorded 2015-12-21
SECURITY AGREEMENT
Recorded 2013-11-06
SECURITY AGREEMENT
Recorded 2013-06-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-06-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-06-07
SECURITY AGREEMENT
Recorded 2010-05-13
from
FREESCALE ACQUISITION CORPORATION,
FREESCALE ACQUISITION HOLDINGS CORP.,
FREESCALE HOLDINGS (BERMUDA) III, LTD.,
FREESCALE SEMICONDUCTOR, INC.
SECURITY AGREEMENT
Recorded 2007-02-02
from
MOTOROLA, INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-07
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Quick Facts
- Patent No.
- US 6,617,587
- App. No.
- 10/243,585
- Filed
- 2002-09-12
- Granted
- 2003-09-09
- Pub. No.
- US20030085360A1
- Examiner
- BERMAN, JACK I
- Art Unit
- 2881
- PTA
- -35 days
External Links