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App. No. 10/675,049 · Confirmation No. 5871

METHOD AND FURNACE FOR THE VAPOR PHASE DEPOSITION OF COMPONENTS ONTO SEMICONDUCTOR SUBSTRATES WITH A VARIABLE MAIN FLOW DIRECTION OF THE PROCESS GAS

Inventor: Ioannis Dotsikas
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2007-06-20 ISSUE.NTF Issue Notification 1 View
2007-05-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2007-04-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2007-03-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2007-02-22 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2006-12-28 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2006-12-28 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2006-12-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2006-12-28 FWCLM Index of Claims 1 View
2006-12-28 SRFW Search information including classification, databases and other search related notes 1 View
2006-12-28 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2006-12-26 WFEE Fee Worksheet (SB06) 1 View
2006-12-26 FWCLM Index of Claims 1 View
2006-12-21 SRNT Examiner's search strategy and results 3 View
2006-12-11 A.NE Response After Final Action 1 View
2006-12-11 CLM Claims 7 View
2006-12-11 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-08-11 CTFR Final Rejection 5 View
2006-08-11 1449 List of References cited by applicant and considered by examiner 1 View
2006-08-11 FWCLM Index of Claims 1 View
2006-07-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-07-03 FOR Foreign Reference 1 View
2006-07-03 FOR Foreign Reference 1 View
2006-05-25 SA.. Supplemental Response or Supplemental Amendment 1 View
2006-05-25 CLM Claims 7 View
2006-05-25 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2006-05-25 WFEE Fee Worksheet (SB06) 1 View
2006-05-24 WFEE Fee Worksheet (SB06) 1 View
2006-05-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-05-15 SPEC Specification 1 View
2006-05-15 CLM Claims 6 View
2006-05-15 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2006-05-15 ABST Abstract 1 View
2006-05-15 LET. Miscellaneous Incoming Letter 1 View
2006-05-15 SPEC Specification 1 View
2006-05-15 CLM Claims 6 View
2006-05-15 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2006-05-15 ABST Abstract 1 View
2006-02-16 CTNF Non-Final Rejection 8 View
2006-02-16 BIB Bibliographic Data Sheet 1 View
2006-02-16 FWCLM Index of Claims 1 View
2005-09-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-09-02 CLM Claims 5 View
2005-09-02 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2005-09-02 WFEE Fee Worksheet (SB06) 1 View
2005-09-02 FWCLM Index of Claims 1 View
2005-06-20 CTNF Non-Final Rejection 5 View
2005-06-20 892 List of references cited by examiner 1 View
2005-06-20 FWCLM Index of Claims 1 View
2005-01-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-01-06 CLM Claims 5 View
2005-01-06 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2005-01-06 WFEE Fee Worksheet (SB06) 1 View
2005-01-06 FWCLM Index of Claims 1 View
2004-10-04 CTNF Non-Final Rejection 5 View
2004-10-04 892 List of references cited by examiner 1 View
2004-10-04 1449 List of References cited by applicant and considered by examiner 1 View
2004-10-04 FWCLM Index of Claims 1 View
2004-10-04 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-25 SRNT Examiner's search strategy and results 9 View
2004-07-27 ELC. Response to Election / Restriction Filed 1 View
2004-06-30 CTRS Requirement for Restriction/Election 4 View
2004-03-11 WFEE Fee Worksheet (SB06) 1 View
2004-03-11 WCLM Claims Worksheet (PTO-2022) 1 View
2003-12-24 PEFN Pre-Exam Formalities Notice 1 View
2003-12-11 A.PE Preliminary Amendment 1 View
2003-12-11 SPEC Specification 3 View
2003-12-11 CLM Claims 5 View
2003-12-11 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-12-11 DRW Drawings-only black and white line drawings 1 View
2003-12-11 OATH Oath or Declaration filed 4 View
2003-12-11 SPEC Specification 39 View
2003-12-11 FRPR Certified Copy of Foreign Priority Application 31 View
2003-09-30 TRNA Transmittal of New Application 2 View
2003-09-30 SPEC Specification 32 View
2003-09-30 CLM Claims 4 View
2003-09-30 ABST Abstract 1 View
2003-09-30 DRW Drawings-only black and white line drawings 3 View
2003-09-30 OATH Oath or Declaration filed 2 View
2003-09-30 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-09-30 WFEE Fee Worksheet (SB06) 1 View
2003-09-30 WFEE Fee Worksheet (SB06) 1 View
2003-09-30 136A Authorization for Extension of Time all replies 2 View
2003-09-30 FOR Foreign Reference 16 View
2003-09-30 FOR Foreign Reference 6 View
2003-09-30 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/675,049
Filed
2003-09-30
Granted
2007-07-10
Pub. No.
US20040081754A1
Examiner
LE, DUNG ANH
Art Unit
2818
PTA
-86 days