Method to improve writer leakage in a SiGe bipolar device
View Patent ↗The invention, in one aspect, provides a method for fabricating a semiconductor device, which includes conducting an etch through an opening in an emitter layer to form a cavity from an underlying oxide layer that exposes a doped tub. A first silicon/germanium (SiGe) layer, which has a Ge concentration therein, is formed within the cavity and over the doped tub by adjusting a process parameter to induce a strain in the first SiGe layer. A second SiGe layer is formed over the first SiGe layer, and a capping layer is formed over the second SiGe layer.
1. A method of manufacturing a semiconductor device, comprising:
conducting an etch through an opening in an emitter window in an emitter region to form a cavity from an underlying oxide layer, the etch exposing a doped tub;
forming a first silicon/germanium (SiGe) layer within the cavity and over the doped tub by adjusting a process parameter to induce a strain in the first SiGe layer, the first SiGe layer having a concentration of Ge therein;
forming a second graded SiGe layer over the first SiGe layer; and
forming a capping layer over the second SiGe layer.
2. The method recited in claim 1 , wherein adjusting the process parameter includes forming the first SiGe layer to a thickness that is less than 35 nm.
3. The method recited in claim 2 , wherein the thickness ranges from about 26 nm to about 34 nm.
4. The method recited in claim 3 , wherein a concentration of Ge in the first SiGe layer is about 12% by weight.
5. The method recited in claim 1 , wherein adjusting includes adjusting a flow rate of Ge such that a concentration of Ge in the first SiGe layer ranges from about 5% to about 10% by weight.
6. The method recited in claim 5 , wherein a thickness of the first SiGe layer ranges from about 26 nm to about 43 nm.
7. The method recited in claim 1 , wherein the second graded SiGe layer is located on the first SiGe layer and has a graded concentration of Ge therein that ranges from about the Ge concentration of the first SiGe at the interface of the first and second SiGe layers to about zero Ge concentration at an upper surface of the second SiGe layer.
8. A semiconductor device, comprising:
a bipolar transistor region, including:
a first a silicon/germanium SiGe layer located over a collector tub and having a Ge concentration and wherein a thickness of the first SiGe layer is less than 35 nm and has a strain associated therewith;
a second SiGe layer located over; and
a silicon capping layer over the second SiGe layer; and
an emitter layer located over the silicon capping layer; and
a non-bipolar transistor region, including transistors having gate electrodes and source/drains associated therewith.
9. The device recited in claim 8 , wherein the Ge concentration of the first SiGe layer is about 12% by weight.
10. The device recited in claim 8 , wherein the thickness ranges from about 26 nm to about 34 nm.
11. The device recited in claim 8 , wherein the Ge concentration of the first SiGe ranges from about 5% to about 10% by weight.
12. The device recited in claim 8 , wherein, the second SiGe layer has a graded concentration of Ge therein that ranges from about the Ge concentration of the first SiGe at the interface of the first and second SiGe layers to about zero Ge concentration at an upper surface of the second SiGe layer.
13. A semiconductor device, comprising:
a bipolar transistor region, including:
a first a silicon/germanium SiGe layer located over a collector tub and having a Ge concentration that ranges from about 5% to about 10% by weight and has a strain associated therewith;
a second SiGe layer located over the first SiGe layer; and
a silicon capping layer over the second SiGe layer; and
an emitter layer located over the silicon capping layer; and
a non-bipolar transistor region, including transistors having gate electrodes and source/drains associated therewith.
14. The device recited in claim 13 , wherein a thickness of the first SiGe layer ranges from about 35 nm to about 43 nm.
15. The device recited in claim 13 , wherein the Ge concentration of the first Si/Ge layer is about 7% by weight.
16. The device recited in claim 13 , wherein the thickness of the first Si/Ge layer ranges from about 26 nm to about 34 nm.
17. The device recited in claim 13 , wherein the second SiGe layer has a graded concentration of Ge therein that ranges from about the Ge concentration of the first SiGe at the interface of the first and second SiGe layers to about zero Ge concentration at an upper surface of the second SiGe layer.
18. A method of manufacturing a semiconductor device, comprising:
forming an emitter for bipolar transistors in a bipolar transistor region, including:
conducting an etch through an opening in an emitter window located in an emitter region to form a cavity from an underlying oxide layer, the etch exposing a collector tub;
forming a first silicon/germanium (SiGe) layer within the cavity and over the collector tub by adjusting a process parameter to induce a strain in the first SiGe layer, the first SiGe layer having a concentration of Ge therein;
forming a graded second SiGe layer over the first SiGe layer;
forming a capping layer over the second SiGe layer;
forming an emitter layer over the capping layer; and
forming non-bipolar transistors in a non-bipolar region, including:
forming gate electrodes over non-bipolar transistor wells; and
forming source/drains in the wells,
conducting a second implant through the openings to place the dopant in the tubs of the vertical bipolar transistor region and form tubs in the second NMOS transistor region, such that the dopant concentration in the tubs of the vertical bipolar transistor region is greater than the dopant concentration in the tubs of the second NMOS transistor region.
19. The method recited in claim 18 , wherein adjusting the process parameter includes forming the first SiGe layer to a thickness that is less than 35 nm.
20. The method recited in claim 18 , wherein the thickness ranges from about 26 nm to about 34 nm.
21. The method recited in claim 20 , wherein a concentration of Ge in the first SiGe layer is about 12% by weight.
22. The method recited in claim 18 , wherein adjusting includes adjusting a flow rate of Ge such that a concentration of Ge in the first SiGe layer ranges from about 5% to about 10% weight.
23. The method recited in claim 22 , wherein a thickness of the first SiGe layer ranges from about 26 nm to about 43 nm.
24. The method recited in claim 18 , wherein the second graded SiGe layer is located on the first SiGe layer and has a graded concentration of Ge therein that ranges from about the Ge concentration of the first SiGe at the interface of the first and second SiGe layers to about zero Ge concentration at an upper surface of the second SiGe layer.