Circuit system with circuit element
View Patent ↗A circuit system includes: forming a first electrode over a substrate; applying a dielectric layer over the first electrode and the substrate; forming a second electrode over the dielectric layer; and forming a dielectric structure from the dielectric layer with the dielectric structure within a first horizontal boundary of the first electrode.
1. A method of manufacturing a circuit system comprising:
forming a first insulating film directly on a substrate to entirely cover the substrate;
forming a first electrode over the first insulating film;
applying a dielectric layer over the entire surface of the substrate including the first electrode;
forming a second electrode over the dielectric layer; and
patterning a dielectric structure from the dielectric layer, between the first electrode and the second electrode, with the dielectric structure within a first horizontal boundary of the first electrode.
2. The method as claimed in claim 1 further comprising forming a resistive film between the first electrode and the dielectric structure.
3. The method as claimed in claim 1 wherein forming the dielectric structure includes forming the dielectric structure having substantially the same horizontal dimensions of the second electrode.
4. The method as claimed in claim 1 further comprising:
forming an insulating film over the substrate; and
wherein forming the dielectric structure includes:
forming the dielectric structure having substantially the same horizontal dimensions of the insulating film.
5. The method as claimed in claim 1 further comprising:
forming an inductor bridge over the substrate; and
forming a resistive film covering the inductor bridge.
6. A method of manufacturing a circuit system comprising:
forming a first insulating film directly on a substrate to entirely cover the substrate;
forming a first electrode over the first insulating film;
forming a resistive film over the first electrode;
applying a dielectric layer over the entire surface of the substrate including the resistive film, and the first electrode;
forming a second electrode over the dielectric layer; and
patterning a dielectric structure from the dielectric layer, between the first electrode and the second electrode, with the dielectric structure within a first horizontal boundary of the first electrode and within a second horizontal boundary of the resistive film.
7. The method as claimed in claim 6 wherein forming the resistive film includes the resistive film over the substrate and adjacent to the first electrode.
8. The method as claimed in claim 6 further comprising:
forming an insulating film along sides of the second electrode; and
wherein forming the dielectric structure includes:
forming the dielectric structure having substantially the same horizontal dimensions with the insulating film.
9. The method as claimed in claim 6 further comprising:
forming an inductor bridge on the dielectric layer;
forming an inductor body on the dielectric layer; and
forming a further dielectric structure from the dielectric layer under the inductor bridge and the inductor body.
10. The method as claimed in claim 6 wherein forming the first electrode over the substrate includes forming the first electrode over an integrated circuit die, a wafer, or a printed circuit board.
11. A circuit system comprising:
a substrate;
a first insulating film directly on a substrate to entirely cover the substrate;
a first electrode, over the first insulating film, characterized by a lack of galvanic corrosion from a second electrode patterned over the first electrode; and
a dielectric structure between the first electrode and the second electrode with the dielectric structure within a first horizontal boundary of the first electrode.
12. The system as claimed in claim 11 further comprising a resistive film between the first electrode and the dielectric structure with the dielectric structure within a second horizontal boundary of the resistive film.
13. The system as claimed in claim 11 wherein the dielectric structure has substantially the same horizontal dimensions of the second electrode.
14. The system as claimed in claim 11 further comprising:
an insulating film over the substrate; and
wherein the dielectric structure includes has substantially the same horizontal dimensions of the insulating film.
15. The system as claimed in claim 11 further comprising:
an inductor bridge over the substrate; and
a resistive film covering the inductor bridge.
16. The system as claimed in claim 11 wherein:
the first electrode is free of pin holes from galvanic corrosion from processing the second electrode; and
the dielectric structure is within a second horizontal boundary of the resistive film.
17. The system as claimed in claim 16 further comprising a resistive film over the substrate and adjacent to the first electrode.
18. The system as claimed in claim 16 further comprising:
an insulating film along sides of the second electrode; and
wherein the dielectric structure has substantially the same horizontal dimensions with the insulating film.
19. The system as claimed in claim 16 further comprising:
an inductor bridge on a further dielectric structure; and
an inductor body on the further dielectric structure.
20. The system as claimed in claim 16 wherein forming the first electrode over the substrate includes forming the first electrode over an integrated circuit die, a wafer, or a printed circuit board.