Method for directional grinding on backside of a semiconductor wafer
View Patent ↗A backside grinding apparatus removes semiconductor material from a surface of a semiconductor wafer. The wafer is mounted to a backing plate. The backside surface undergoes a first grinding operation in a rotational motion to remove excess semiconductor material. The semiconductor wafer is then aligned such that edges of the die are oriented along a reference line. The backside surface undergoes a second grinding operation in a linear direction on a 45-diagonal with respect to the reference line to create linear grind marks which are diagonal to the edges of the die. The linear grind marks are formed by an abrasive surface having at least 4000 mesh count. The second grinding operation removes the radial grind marks produced by the first grinding operation. The linear grind marks oriented diagonal with respect to the reference line increases the strength of the die to resist cracking.
1. A method of removing semiconductor material from a surface of a semiconductor wafer, comprising:
mounting the semiconductor wafer to a backing plate, the semiconductor wafer having a plurality of die and a front surface with active devices formed thereon facing the backing plate and a backside surface facing opposite to the backing plate;
grinding the backside surface of the semiconductor wafer in a rotational motion to remove excess semiconductor material;
aligning the semiconductor wafer such that edges of the die are oriented along a reference line; and
grinding the backside surface of the semiconductor wafer in a linear direction diagonal to the reference line to create linear grind marks which are oriented diagonal to the edges of the die.
2. The method of claim 1 , further including forming the linear grind marks on a 45-degree diagonal with respect to the reference line.
3. The method of claim 1 , further including forming the linear grind marks with a cylinder having an abrasive surface.
4. The method of claim 1 , further including forming the linear grind marks with a wheel having an abrasive surface.
5. The method of claim 1 , further including forming the linear grind marks with an abrasive surface having at least 4000 mesh count.
6. The method of claim 1 , wherein the linear grind marks oriented on a diagonal with respect to the reference line increase the strength of the die to resist cracking.
7. The method of claim 1 , wherein the grinding removes semiconductor material to create a planar backside surface without polishing.
8. A method of removing semiconductor material from a backside surface of a semiconductor wafer, comprising:
mounting the semiconductor wafer to a backing plate, the semiconductor wafer having a plurality of die;
aligning the semiconductor wafer such that edges of the die are oriented along a reference line; and
grinding the backside surface of the semiconductor wafer in a linear direction diagonal to the reference line to create linear grind marks which are oriented diagonal to the edges of the die.
9. The method of claim 8 , further including grinding the backside surface of the semiconductor wafer in a rotational motion prior to grinding the backside surface in a linear direction diagonal to the reference line.
10. The method of claim 8 , further including forming the linear grind marks on a 45-degree diagonal with respect to the reference line.
11. The method of claim 8 , further including forming the linear grind marks with a cylinder having an abrasive surface.
12. The method of claim 8 , further including forming the linear grind marks with a wheel having an abrasive surface.
13. The method of claim 8 , further including forming the linear grind marks with an abrasive surface having at least 4000 mesh count.
14. A method of removing semiconductor material from a semiconductor wafer having a plurality of die, a front surface with active devices formed thereon, and a backside surface opposite the front surface, the method comprising:
grinding the backside surface using a rotational motion to remove excess semiconductor material;
after grinding the backside surface using the rotational motion, aligning the semiconductor wafer such that two edges of each die are oriented substantially parallel to a reference line; and
after aligning the semiconductor wafer, grinding the backside surface in a linear direction to form linear grind marks in the semiconductor wafer, the linear direction intersecting the reference line at an angle.
15. The method of claim 14 , wherein the angle is substantially 45 degrees.
16. The method of claim 14 , wherein grinding the backside surface comprises grinding such that all the linear grind marks on the wafer are substantially parallel.
17. A method of removing semiconductor material from a backside surface of a semiconductor wafer having a plurality of die, the method comprising:
aligning the semiconductor wafer such that two edges of each die are oriented along a reference line; and
grinding the backside surface of the semiconductor wafer in a linear direction that is at an angle relative to the reference line to create linear grind marks in the wafer, the linear grind marks oriented to the two edges of each die at the angle.
18. The method of claim 17 , wherein the angle is substantially 45 degrees.
19. The method of claim 17 , wherein grinding the backside surface comprises grinding such that all the linear grind marks on the wafer are substantially parallel.