INTEGRATED CIRCUIT PACKAGING SYSTEM WITH AN INTEGRAL-INTERPOSER-STRUCTURE AND METHOD OF MANUFACTURE THEREOF
A method of manufacture of an integrated circuit packaging system includes: providing a substrate having a shielding channel through a substrate first side and a substrate second side; mounting a first shielding interconnect to the shielding channel; mounting an integrated circuit over the substrate and adjacent to the first shielding interconnect; attaching a silicon interposer, having an integral-conductive-shield and a via, to the first shielding interconnect with the integral-conductive-shield over the integrated circuit; grounding the shielding channel at the substrate second side; and forming an encapsulation over the substrate covering the integrated circuit and the first shielding interconnect.
1 . A method of manufacture of an integrated circuit packaging system comprising:
providing a substrate having a shielding channel through a substrate first side and a substrate second side;
mounting a first shielding interconnect to the shielding channel;
mounting an integrated circuit over the substrate and adjacent to the first shielding interconnect;
attaching a silicon interposer, having an integral-conductive-shield and a via, to the first shielding interconnect with the integral-conductive-shield over the integrated circuit;
grounding the shielding channel at the substrate second side; and
forming an encapsulation over the substrate covering the integrated circuit and the first shielding interconnect.
2 . The method as claimed in claim 1 wherein forming the encapsulation includes forming the encapsulation planar with a silicon interposer first side that is exposed from the encapsulation.
3 . The method as claimed in claim 1 wherein the attaching the silicon interposer includes attaching the integral-conductive-shield to the first shielding interconnect.
4 . The method as claimed in claim 1 further comprising:
attaching an embedded interconnect to the silicon interposer; and
wherein forming the encapsulation includes forming the encapsulation around and exposing the embedded interconnect.
5 . The method as claimed in claim 1 further comprising mounting an internal device over the substrate between the integrated circuit and the first shielding interconnect.
6 . A method of manufacture of an integrated circuit packaging system comprising:
providing a substrate having a shielding channel through a substrate first side and a substrate second side;
mounting a first shielding interconnect to the shielding channel;
mounting an integrated circuit over the substrate and facing the substrate first side with the integrated circuit adjacent to the first shielding interconnect;
mounting an internal interconnect over the substrate first side;
attaching a silicon interposer, having an integral-conductive-shield, a contact pad, and a via, to the first shielding interconnect and the internal interconnect with the integral-conductive-shield over the integrated circuit;
mounting a second shielding interconnect to the shielding channel along the substrate second side;
grounding the second shielding interconnect at the substrate second side; and
forming an encapsulation over the substrate covering the integrated circuit and the first shielding interconnect.
7 . The method as claimed in claim 6 further comprising:
mounting an integrated circuit die stack over the silicon interposer; and
wherein forming the encapsulation includes forming the encapsulation over the integrated circuit die stack.
8 . The method as claimed in claim 6 further comprising:
mounting an integrated circuit device over the silicon interposer; and
wherein forming the encapsulation includes forming the encapsulation over the integrated circuit device.
9 . The method as claimed in claim 6 wherein mounting the second shielding interconnect includes attaching an external interconnect to the substrate second side.
10 . The method as claimed in claim 6 wherein mounting the integrated circuit over the substrate includes mounting a flip-chip.
11 . An integrated circuit packaging system comprising:
a substrate having a shielding channel through a substrate first side and a substrate second side with the shielding channel grounded at the substrate second side;
a first shielding interconnect mounted to the shielding channel;
an integrated circuit mounted over the substrate and adjacent to the first shielding interconnect;
a silicon interposer, having an integral-conductive-shield and a via, attached to the first shielding interconnect with the integral-conductive-shield over the integrated circuit; and
an encapsulation over the substrate covering the integrated circuit and the first shielding interconnect.
12 . The system as claimed in claim 11 wherein the encapsulation is planar with a silicon interposer first side that is exposed from the encapsulation.
13 . The system as claimed in claim 11 wherein the silicon interposer includes the integral-conductive-shield attached to the first shielding interconnect.
14 . The system as claimed in claim 11 further comprising:
an embedded interconnect attached to the silicon interposer; and
wherein the encapsulation is around and exposes the embedded interconnect.
15 . The system as claimed in claim 11 further comprising an internal device mounted over the substrate between the integrated circuit and the first shielding interconnect.
16 . The system as claimed in claim 11 further comprising:
a contact pad exposed at a silicon interposer first side;
an internal interconnect mounted over the substrate first side; and
wherein:
the silicon interposer is attached to the internal interconnect; and
the integral-conductive-shield is along a silicon interposer second side.
17 . The system as claimed in claim 16 further comprising:
an integrated circuit die stack mounted over the silicon interposer; and
wherein the encapsulation is over the integrated circuit die stack.
18 . The system as claimed in claim 16 further comprising:
an integrated circuit device mounted over the silicon interposer; and
wherein the encapsulation is over the integrated circuit device.
19 . The system as claimed in claim 16 further comprising an external interconnect attached to the substrate second side.
20 . The system as claimed in claim 16 wherein the integrated circuit mounted over the substrate includes a flip-chip.