Semiconductor device and method of forming adhesive material to secure semiconductor die to carrier in WLCSP
View Patent ↗A semiconductor device is made by providing a temporary carrier and providing a semiconductor die having a plurality of bumps formed on its active surface. An adhesive material is deposited as a plurality of islands or bumps on the carrier or active surface of the semiconductor die. The adhesive layer can also be deposited as a continuous layer over the carrier or active surface of the die. The semiconductor die is mounted to the carrier. An encapsulant is deposited over the die and carrier. The adhesive material holds the semiconductor die in place to the carrier while depositing the encapsulant. An interconnect structure is formed over the active surface of the die. The interconnect structure is electrically connected to the bumps of the semiconductor die. The adhesive material can be removed prior to forming the interconnect structure, or the interconnect structure can be formed over the adhesive material.
1. A method of making a semiconductor device, comprising:
providing a carrier;
providing a semiconductor die including a plurality of first bumps formed over a surface of the semiconductor die;
depositing an adhesive material as a plurality of islands or second bumps over the carrier or surface of the semiconductor die;
disposing the semiconductor die over the carrier and adhesive material;
depositing an encapsulant over the semiconductor die and carrier while the adhesive material holds the semiconductor die in place to the carrier;
removing the carrier; and
forming an interconnect structure over the surface of the semiconductor die, the interconnect structure being electrically connected to the plurality of first bumps of the semiconductor die.
2. The method of claim 1 , further including removing the adhesive material prior to forming the interconnect structure.
3. The method of claim 1 , further including forming the interconnect structure over the adhesive material and the surface of the semiconductor die.
4. The method of claim 1 , wherein forming the interconnect structure includes:
forming a first insulating layer;
forming a conductive layer over the first insulating layer;
forming a second insulating layer over the conductive layer; and
forming a plurality of third bumps over the conductive layer.
5. The method of claim 1 , wherein forming the interconnect structure includes:
forming an insulating layer;
forming a conductive layer over the insulating layer; and
forming a plurality of third bumps over the conductive layer.
6. The method of claim 1 , further including depositing the adhesive material in a central region of the semiconductor die.
7. The method of claim 1 , further including depositing the adhesive material in a peripheral or corner region of the semiconductor die.
8. A method of making a semiconductor device, comprising:
providing a carrier;
providing a semiconductor component;
depositing an adhesive material as a plurality of islands or first bumps over the carrier or a surface of the semiconductor component;
disposing the semiconductor component over the carrier;
depositing an encapsulant over the semiconductor component and carrier while the adhesive material holds the semiconductor component in place to the carrier;
removing the carrier; and
forming an interconnect structure over the surface of the semiconductor component.
9. The method of claim 8 , further including removing the adhesive material prior to forming the interconnect structure.
10. The method of claim 8 , further including forming the interconnect structure over the adhesive material and the surface of the semiconductor component.
11. The method of claim 8 , wherein forming the interconnect structure includes:
forming a first insulating layer;
forming a conductive layer over the first insulating layer;
forming a second insulating layer over the conductive layer; and
forming a plurality of second bumps over the conductive layer.
12. The method of claim 8 , wherein forming the interconnect structure includes:
forming an insulating layer;
forming a conductive layer over the insulating layer; and
forming a plurality of second bumps over the conductive layer.
13. The method of claim 8 , further including depositing the adhesive material in a central region of the semiconductor component.
14. The method of claim 8 , further including depositing the adhesive material in a peripheral or corner region of the semiconductor component.
15. A method of making a semiconductor device, comprising:
providing a carrier including an interface layer;
providing a semiconductor component including a plurality of bumps;
depositing an adhesive material over the carrier or semiconductor component;
disposing the semiconductor component over the carrier;
depositing an encapsulant over the semiconductor component while the adhesive material holds the semiconductor component in place over the carrier; and
removing the adhesive material.
16. The method of claim 15 , further including depositing the adhesive material as a plurality of islands or bumps over the carrier or semiconductor component.
17. The method of claim 15 , further including depositing the adhesive material as a continuous layer over the carrier or semiconductor component.
18. The method of claim 15 , further including forming an interconnect structure under the semiconductor component.
19. A method of making a semiconductor device, comprising:
providing a carrier;
providing a semiconductor component including a plurality of bumps;
depositing an adhesive material over the carrier or semiconductor component;
disposing the semiconductor component over the carrier with the adhesive material around the bumps and between the carrier and semiconductor component; and
removing the adhesive material.
20. The method of claim 19 , further including depositing the adhesive material as a plurality of islands or bumps over the carrier or semiconductor component.
21. The method of claim 19 , further including depositing the adhesive material in a central region or peripheral or corner region of the semiconductor component.
22. The method of claim 19 , further including depositing the adhesive material as a continuous layer over the carrier or semiconductor component.
23. The method of claim 19 , further including forming an interconnect structure under the and semiconductor component.
24. A method of making a semiconductor device, comprising:
providing a semiconductor die;
providing a carrier including an interface layer;
depositing an adhesive material as a plurality of islands or bumps over the interface layer or semiconductor die; and
disposing the semiconductor die over the interface layer with the adhesive material bonding the semiconductor die and interface layer.
25. The method of claim 24 , further including depositing the adhesive material in a peripheral region of the semiconductor die.
26. The method of claim 24 , further including depositing the adhesive material between the semiconductor die and carrier.