Self-aligned patterning method by using non-conformal film and etch for flash memory and other semiconductor applications
A method for fabricating a memory device with a self-aligned trap layer which is optimized for scaling is disclosed. In the present invention, a non-conformal film is deposited over the charge trapping layer to form a thick film on top of the core source/drain region and a pinch off and a void or a narrow channel at the top of the STI trench. An etch is performed on the non-conformal film to open pinch-off or widen the narrow channel in the non-conformal. The trapping layer is then completely or partially etched between the core cells. The non-conformal film is removed. And a top oxide is formed. The top oxide converts the remaining trap layer to oxide if the trapping layer is partially etched and thus isolate the trap layer.
1. A memory device, comprising:
a semiconductor substrate:
a plurality of active regions;
a plurality of trenches separating the active regions; and
a plurality of self-aligned charge trapping structures disposed over said plurality of active regions, wherein said charge trapping structures are separated at their respective bottom areas wherein said self-aligned charge trapping structures comprise a non-conformal film layer over a charge trapping layer, wherein said non-conformal film layer forms a pinch-off region and a void over an STI trench.
2. The memory device of claim 1 wherein said non-conformal film comprises a polymer.
3. The memory device of claim 2 wherein said polymer is deposited in a processing chamber using plasma and/or other means.
4. The memory device of claim 3 wherein said polymer is deposited by a combination of gases selected from said group consisting of fluorocarbon gas(es), hydrocarbon gas(es), noble gases and other gases.
5. The memory device of claim 4 wherein said fluorocarbon gases comprise CR 3 F, said hydrocarbon gases comprise C 2 H 4 , and said other gases comprise HBr, Br 2 , HCl, Cl 2 , H 2 , or noble gases.
6. The memory device of claim 1 wherein said non-conformal film comprises amorphous carbon.
7. The memory device of claim 1 wherein said non-conformal film comprises high density plasma oxide.
8. The memory device of claim 1 wherein said non-conformal film comprises silane oxide.
9. The memory device of claim 1 wherein said non-conformal film comprises low k oxide.
10. The memory device of claim 1 , wherein an optional thin conformal sacrificial top oxide is formed over said charge trapping layer before depositing said non-conformal film layer.
11. The memory device of claim 1 , wherein the active regions have corners which are rounded in a rounding process before the plurality of charge trapping structures are formed.
12. The memory device of claim 1 , wherein said charge trapping structures comprise an oxide-nitride-oxide structure.
13. The memory device of claim 11 , wherein the nitride of said oxide-nitride-oxide structure is comprised of silicon rich nitride.
14. A device comprising:
a processor;
a bus coupled to said processor;
a non-volatile memory coupled to said bus, wherein said non-volatile memory comprises:
a semiconductor substrate;
a plurality of active regions;
a plurality of trenches separating said active regions; and
a plurality of charge trapping structures disposed over said plurality of active regions, wherein said charge trapping structures are self-aligned and are separated at their respective bottom-most areas wherein said charge trapping structures comprise a non-conformal film layer over a charge trapping layer, wherein said non-conformal film layer forms a pinch-off region and a void over an STI trench.
15. The device of claim 14 , wherein said plurality of charge trapping structures are self-aligned by using a non-conformal film deposition.
16. The device of claim 15 wherein said non-conformal film comprises a polymer.
17. The device of claim 16 wherein said polymer is deposited in a processing chamber using plasma and/or other means.
18. The device of claim 17 wherein said polymer is deposited using a combination of gases selected from the group consisting of fluorocarbon gas(es), hydrocarbon gas(es), noble gases and other gases.
19. The device system of claim 18 wherein said fluorocarbon gases comprises CH 3 F, said hydrocarbon comprises C 2 H 4 , and said other gases comprise HBr, Br 2 , HCl, Cl 2 , H 2 , or noble gases.
20. The device of claim 15 wherein said non-conformal film comprises amorphous carbon.
21. The device of claim 20 wherein said amorphous carbon is deposited in a CVD chamber.
22. The device of claim 15 wherein said non-conformal film comprises high density plasma oxide.
23. The device of claim 15 wherein said non-conformal film comprises silane oxide.
24. The device of claim 15 wherein said non-conformal film comprises low k oxide.
25. The device of claim 14 , wherein the processor, bus, and non-volatile memory comprise an image capture device.
26. The system of claim 14 , wherein the processor, bus, and non-volatile memory comprise a communications device.
27. The system of claim 14 , wherein the processor, bus, and non-volatile memory comprise a computing device.