IP Library Granted Patent US 8,288,201
Granted Patent B2
US 8,288,201 · App. 12/868,334 · Granted Oct 16, 2012

Semiconductor device and method of forming FO-WLCSP with discrete semiconductor components mounted under and over semiconductor die

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Quick Facts
Patent No.
US 8,288,201
App. No.
12/868,334
Granted
Oct 16, 2012
Kind
B2
Abstract

A semiconductor die has first and second discrete semiconductor components mounted over a plurality of wettable contact pads formed on a carrier. Conductive pillars are formed over the wettable contact pads. A semiconductor die is mounted to the conductive pillars over the first discrete components. The conductive pillars provide vertical stand-off of the semiconductor die as headroom for the first discrete components. The second discrete components are disposed outside a footprint of the semiconductor die. Conductive TSV can be formed through the semiconductor die. An encapsulant is deposited over the semiconductor die and first and second discrete components. The wettable contact pads reduce die and discrete component shifting during encapsulation. A portion of a back surface of the semiconductor die is removed to reduce package thickness. An interconnect structure is formed over the encapsulant and semiconductor die. Third discrete semiconductor components can be mounted over the semiconductor die.

Claims (61)

1. A method of making a semiconductor device, comprising:

providing a carrier;

forming a plurality of wettable contact pads over the carrier;

mounting a plurality of first discrete semiconductor components over the wettable contact pads;

mounting a plurality of second discrete semiconductor components over the wettable contact pads;

forming a plurality of conductive pillars over the wettable contact pads;

mounting a semiconductor die to the conductive pillars over the first discrete semiconductor components with the second discrete semiconductor components disposed outside a footprint of the semiconductor die;

depositing an encapsulant over the semiconductor die and first and second discrete semiconductor components;

removing a portion of a back surface of the semiconductor die opposite the conductive pillars;

removing the carrier; and

forming a first interconnect structure over the encapsulant and semiconductor die.

2. The method of claim 1 , wherein the wettable contact pads reduce shifting of the semiconductor die and first and second discrete semiconductor components during encapsulation.

3. The method of claim 1 , further including mounting a plurality of third discrete semiconductor components over the semiconductor die prior to depositing the encapsulant.

4. The method of claim 1 , further including depositing an insulating material over the first discrete semiconductor components prior to mounting the semiconductor die.

5. The method of claim 1 , further including forming a second interconnect structure over the first discrete semiconductor components for electrical connection to the semiconductor die.

6. The method of claim 1 , further including forming a plurality of conductive vias through the semiconductor die.

7. A method of making a semiconductor device, comprising:

providing a carrier;

mounting a first discrete semiconductor component over the carrier;

forming a first interconnect structure over the carrier;

mounting a semiconductor die to the first interconnect structure over the first discrete semiconductor component;

depositing an encapsulant over the semiconductor die and first discrete semiconductor component;

removing a portion of a back surface of the semiconductor die opposite the first interconnect structure;

removing the carrier; and

forming a second interconnect structure over the encapsulant and semiconductor die.

8. The method of claim 7 , further including mounting a second discrete semiconductor component over the carrier outside a footprint of the semiconductor die.

9. The method of claim 7 , further including forming a plurality of wettable contact pads over the carrier prior to mounting the first discrete semiconductor component and forming the first interconnect structure.

10. The method of claim 7 , wherein the first interconnect structure includes conductive pillars or stacked bumps.

11. The method of claim 7 , wherein the first interconnect structure includes bumps.

12. The method of claim 7 , further including forming a shielding layer between the first discrete semiconductor component and semiconductor die.

13. The method of claim 7 , further including mounting a third discrete semiconductor component over the semiconductor die.

14. A method of making a semiconductor device, comprising:

providing a carrier;

mounting a first discrete semiconductor component over the carrier;

mounting a semiconductor die to the carrier with the first discrete semiconductor component disposed outside a footprint of the semiconductor die;

removing a portion of a back surface of the semiconductor die;

mounting a second discrete semiconductor component over the semiconductor die;

depositing an encapsulant over the semiconductor die and first and second discrete semiconductor components;

removing the carrier; and

forming an interconnect structure over the encapsulant and semiconductor die.

15. The method of claim 14 , further including forming a plurality of wettable contact pads over the carrier prior to mounting the first discrete semiconductor component and semiconductor die.

16. The method of claim 14 , further including forming an insulating layer over the semiconductor die.

17. The method of claim 14 , further including forming a plurality of wettable contact pads over the semiconductor die.

18. The method of claim 14 , further including forming a plurality of conductive vias through the semiconductor die, the conductive vias being electrically connected to the second discrete semiconductor component.

19. The method of claim 14 , further including depositing an underfill material under the semiconductor die.

20. The method of claim 14 , further including mounting a third discrete semiconductor component under the semiconductor die.

21. A method of making a semiconductor device, comprising:

providing a carrier including a designated area;

mounting a first discrete semiconductor component over the carrier and within a footprint of the designated area of the carrier;

mounting a semiconductor die over the carrier and within the footprint of the designated area of the carrier;

removing a portion of a back surface of the semiconductor die;

depositing an encapsulant over the semiconductor die and first discrete semiconductor components;

removing the carrier; and

forming an interconnect structure over the encapsulant and semiconductor die.

22. The method of claim 21 , further including mounting a second discrete semiconductor component over the carrier and outside the footprint of the designated area of the carrier.

23. The method of claim 21 , further including forming a plurality of wettable contact pads over the carrier.

24. The method of claim 21 , further including forming a conductive pillar or bump over the carrier and within the footprint of the designated area of the carrier.

25. The method of claim 21 , further including:

the semiconductor die comprising a conductive via formed through the semiconductor die;

forming a conductive layer over and electrically connected to the conductive via of the semiconductor die; and

mounting the first discrete semiconductor component to the conductive layer.

Assignments (6)
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNEE'S NAME PREVIOUSLY RECORDED AT REEL: 038378 FRAME: 0252. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Aug 31, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 065236/0784 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 18, 2019
From: STATS CHIPPAC PTE. LTD.
To: JCET SEMICONDUCTOR (SHAOXING) CO., LTD.
Reel/Frame 051365/0680 →
RELEASE OF SECURITY INTEREST Recorded Dec 13, 2019
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 051285/0318 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0252 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 25, 2010
From: PAGAILA, REZA A.; LIN, YAOJIAN; KOO, JUN MO
To: STATS CHIPPAC, LTD.
Reel/Frame 024886/0449 →