Semiconductor device and method of forming bond-on-lead interconnection for mounting semiconductor die in FO-WLCSP
View Patent ↗A semiconductor die has a conductive layer including a plurality of trace lines formed over a carrier. The conductive layer includes a plurality of contact pads electrically continuous with the trace lines. A semiconductor die has a plurality of contact pads and bumps formed over the contact pads. A plurality of conductive pillars can be formed over the contact pads of the semiconductor die. The bumps are formed over the conductive pillars. The semiconductor die is mounted to the conductive layer with the bumps directly bonded to an end portion of the trace lines to provide a fine pitch interconnect. An encapsulant is deposited over the semiconductor die and conductive layer. The conductive layer contains wettable material to reduce die shifting during encapsulation. The carrier is removed. An interconnect structure is formed over the encapsulant and semiconductor die. An insulating layer can be formed over the conductive layer.
1. A method of making a semiconductor device, comprising:
providing a carrier;
forming a conductive layer including a plurality of trace lines over the carrier;
providing a semiconductor die having a plurality of contact pads;
forming a plurality of conductive pillars over the contact pads of the semiconductor die, then;
forming a plurality of first bumps in direct contact with the conductive pillars, then;
mounting the semiconductor die to the conductive layer with the first bumps directly bonded to an end portion of the trace lines, then;
depositing an encapsulant over the semiconductor die and conductive layer, then;
removing the carrier; and then;
forming an interconnect structure over the encapsulant and semiconductor die.
2. The method of claim 1 , wherein the conductive layer includes wettable material to reduce shifting of the semiconductor die during encapsulation.
3. The method of claim 1 , further including:
forming a masking layer over the carrier and conductive layer; and
forming an opening in the masking layer over the end portion of the trace lines.
4. The method of claim 3 , wherein forming the interconnect structure includes:
forming an insulating layer over the encapsulant and semiconductor die; and
forming a plurality of second bumps over the conductive layer.
5. The method of claim 1 , further including forming an insulating layer over the conductive layer prior to mounting the semiconductor die.
6. A method of making a semiconductor device, comprising:
providing a carrier;
forming a conductive layer including a plurality of trace lines over the carrier;
providing a semiconductor die having a plurality of contact pads;
forming a plurality of conductive pillars over the contact pads of the semiconductor die, then;
forming a plurality of first bumps in direct contact with the conductive pillars, then;
mounting the semiconductor die to the conductive layer with the first bumps directly bonded to the trace lines, then;
depositing an encapsulant over the semiconductor die and conductive layer, wherein the conductive layer includes wettable material to reduce shifting of the semiconductor die during encapsulation, then;
removing the carrier; and then;
forming an interconnect structure over the encapsulant and semiconductor die.
7. The method of claim 6 , further including mounting the semiconductor die to the conductive layer with the first bumps directly bonded to an end portion of the trace lines.
8. The method of claim 6 , further including depositing the encapsulant under the semiconductor die with a mold underfill process.
9. The method of claim 6 , wherein forming the interconnect structure includes:
forming an insulating layer over the encapsulant and semiconductor die; and
forming a plurality of second bumps over the second conductive layer.
10. The method of claim 6 , further including forming an insulating layer over the conductive layer prior to mounting the semiconductor die.
11. The method of claim 10 , wherein the insulating layer includes a no-flow underfill material.
12. A method of making a semiconductor device, comprising:
forming a conductive layer including a plurality of trace lines;
providing a semiconductor die having a plurality of contact pads;
forming a plurality of conductive pillars over the contact pads of the semiconductor die, then;
forming a plurality of first bumps in direct contact with the conductive pillars, then;
mounting the semiconductor die to the conductive layer with the first bumps directly bonded to the trace lines, then;
depositing an encapsulant over the semiconductor die and conductive layer; and then;
forming an interconnect structure over the encapsulant and semiconductor die by,
(a) forming an insulating layer, and
(b) forming a plurality of second bumps over the conductive layer.
13. The method of claim 12 , further including mounting the semiconductor die to the conductive layer with the first bumps directly bonded to an end portion of the trace lines.
14. The method of claim 12 , wherein the first bumps are wider than the trace lines.
15. The method of claim 12 , further including:
forming a masking layer over the carrier and conductive layer; and
forming an opening in the masking layer over the end portion of the trace lines.