Digitally obtaining contours of fabricated polygons
View Patent ↗The present invention provides a method for digitally obtaining contours of fabricated polygons. A GDS polygon described in a Geographic Data System (GDS) file is provided. Based on the GDS polygon, a plurality of identical polygons is fabricated with the same fabrication process such that shapes of the plurality of identical polygons are altered by optical effects in the same or similar way. The plurality of identical polygons forms poly-silicon gates of a plurality of test transistors. The position of source and drain islands along a length of a poly-silicon gate for each of the plurality of test transistors is different. Using Automated Test Equipment (ATE), a digital test is performed on a circuit including the plurality of test transistors to obtain test responses, the test responses being raw digital data. The test responses may be displayed in a histogram reflecting a contour of the plurality of identical polygons or post-processed to reconstruct a contour of the plurality of identical polygons.
1. A method for digitally obtaining contours of fabricated polygons, comprising:
providing a GDS polygon described in a Geographic Data System (GDS) file;
fabricating, based on said GDS polygon, a plurality of identical polygons with a same fabrication process such that shapes of said plurality of identical polygons are altered by optical effects in a same or similar way, said plurality of identical polygons forming poly-silicon gates of a plurality of test transistors, a position of source and drain islands along a length of a poly-silicon gate for each of said plurality of test transistors being different; and
performing, using Automated Test Equipment (ATE), a digital test on a circuit including said plurality of test transistors to obtain test responses, said test responses being raw digital data.
2. The method of claim 1 , wherein said circuit includes at least one ring oscillator.
3. The method of claim 1 , wherein said circuit includes a first flip-flop placed at a beginning of said circuit for launching a pulse in synchronization with a clock and a second flip-flop placed at an end of said circuit for capturing a response of said circuit at a next clock cycle.
4. The method of claim 3 , further comprises displaying said test responses in a histogram showing a number of times a particular test transistor is not able to pull down an input to said second flip-flop to logic-0, said histogram reflecting a contour of said plurality of identical polygons.
5. The method of claim 1 , further comprises post-processing said test responses to reconstruct a contour of said plurality of identical polygons.
6. The method of claim 5 , wherein said post-processing comprises weighing each test transistor failure event by a function of a test frequency.
7. The method of claim 1 , wherein said plurality of test transistors includes a test transistor whose source and drain islands are placed at one end of its poly-silicon gate along a length of said poly-silicon gate.
8. A non-transitory computer-readable medium having computer-executable instructions for performing a method for digitally obtaining contours of fabricated polygons, said method comprising:
providing a GDS polygon described in a Geographic Data System (GDS) file;
fabricating, based on said GDS polygon, a plurality of identical polygons with a same fabrication process such that shapes of said plurality of identical polygons are altered by optical effects in a same or similar way, said plurality of identical polygons forming poly-silicon gates of a plurality of test transistors, a position of source and drain islands along a length of a poly-silicon gate for each of said plurality of test transistors being different; and
performing, using Automated Test Equipment (ATE), a digital test on a circuit including said plurality of test transistors to obtain test responses, said test responses being raw digital data.
9. The non-transitory computer-readable medium of claim 8 , wherein said circuit includes at least one ring oscillator.
10. The non-transitory computer-readable medium of claim 8 , wherein said circuit includes a first flip-flop placed at a beginning of said circuit for launching a pulse in synchronization with a clock and a second flip-flop placed at an end of said circuit for capturing a response of said circuit at a next clock cycle.
11. The non-transitory computer-readable medium of claim 10 , wherein said method further comprises displaying said test responses in a histogram showing a number of times a particular test transistor is not able to pull down an input to said second flip-flop to logic-0, said histogram reflecting a contour of said plurality of identical polygons.
12. The non-transitory computer-readable medium of claim 8 , wherein said method further comprises post-processing said test responses to reconstruct a contour of said plurality of identical polygons.
13. The non-transitory computer-readable medium of claim 12 , wherein said post-processing comprises weighing each test transistor failure event by a function of a test frequency.
14. The non-transitory computer-readable medium of claim 8 , wherein said plurality of test transistors includes a test transistor whose source and drain islands are placed at one end of its poly-silicon gate along a length of said poly-silicon gate.