Semiconductor device and method of forming sacrificial protective layer to protect semiconductor die edge during singulation
View Patent ↗A semiconductor wafer contains a plurality of semiconductor die separated by a saw street. An insulating layer is formed over the semiconductor wafer. A protective layer is formed over the insulating layer including an edge of the semiconductor die along the saw street. The protective layer covers an entire surface of the semiconductor wafer. Alternatively, an opening is formed in the protective layer over the saw street. The insulating layer has a non-planar surface and the protective layer has a planar surface. The semiconductor wafer is singulated through the protective layer and saw street to separate the semiconductor die while protecting the edge of the semiconductor die. Leading with the protective layer, the semiconductor die is mounted to a carrier. An encapsulant is deposited over the semiconductor die and carrier. The carrier and protective layer are removed. A build-up interconnect structure is formed over the semiconductor die and encapsulant.
1. A semiconductor device, comprising:
a semiconductor wafer including a plurality of semiconductor die separated by a saw street;
a first conductive layer formed over the semiconductor die;
a first insulating layer including a non-planar surface formed over the semiconductor die and first conductive layer; and
a protective layer including a planar surface formed over the saw street and the first insulating layer and covering the first conductive layer.
2. The semiconductor device of claim 1 , further including a trench formed in the protective layer over the saw street.
3. The semiconductor device of claim 2 , further including a second conductive layer formed over the saw street between adjacent semiconductor die.
4. The semiconductor device of claim 1 , further including a trench comprising a plurality of notches formed in the protective layer over the saw street.
5. A semiconductor device, comprising:
a semiconductor wafer including a plurality of semiconductor die separated by a saw street;
a first insulating layer formed over the semiconductor wafer; and
a protective layer formed over the saw street and first insulating layer.
6. The semiconductor device of claim 5 , wherein the first insulating layer has a non-planar surface and the protective layer has a planar surface.
7. The semiconductor device of claim 5 , further including a trench formed in the protective layer over the saw street.
8. The semiconductor device of claim 5 , wherein the protective layer is formed over an entire surface of the semiconductor wafer.
9. A semiconductor device, comprising:
a semiconductor die;
a first insulating layer including a non-planar surface formed over the semiconductor die;
an encapsulant deposited over the semiconductor die; and
a first channel formed in the encapsulant adjacent to the semiconductor die.
10. The semiconductor device of claim 9 , wherein the encapsulant is planarized with a surface of the semiconductor die.
11. The semiconductor device of claim 9 , further including a second insulating layer disposed in the first channel.
12. The semiconductor device of claim 11 , further including a second channel formed in the second insulating layer.
13. The semiconductor device of claim 9 , further including an interconnect structure formed over the semiconductor die and encapsulant.
14. The semiconductor device of claim 13 , wherein the interconnect structure includes:
a second insulating layer formed over the encapsulant and first insulating layer;
a conductive layer formed over the second insulating layer; and
a third insulating layer formed over the second insulating layer and conductive layer.
15. A semiconductor device, comprising:
a semiconductor die;
a first insulating layer formed over the semiconductor die;
a protective layer formed over the first insulating layer; and
an encapsulant deposited over the semiconductor die coplanar with the protective layer.
16. The semiconductor device of claim 15 , wherein the first insulating layer has a non-planar surface.
17. The semiconductor device of claim 15 , wherein the protective layer has a planar surface.
18. The semiconductor device of claim 15 , wherein the encapsulant is planarized with a surface of the semiconductor die.
19. The semiconductor device of claim 15 , further including a channel formed in the encapsulant outside a footprint of the semiconductor die.
20. The semiconductor device of claim 2 , wherein a width of the trench is less than a width of the saw street.
21. The semiconductor device of claim 3 , wherein a width of the trench is less than a width of the conductive layer.
22. The semiconductor device of claim 7 , wherein a width of the trench is less than a width of the saw street.
23. The semiconductor device of claim 7 , further including a conductive layer formed over the saw street between adjacent semiconductor die.
24. The semiconductor device of claim 23 , wherein a width of the trench is less than a width of the conductive layer.