Optimized electrodes for Re-RAM
Optimized electrodes for ReRAM memory cells and methods for forming the same are discloses. One aspect comprises forming a first electrode, forming a state change element in contact with the first electrode, treating the state change element, and forming a second electrode. Treating the state change element increases the barrier height at the interface between the second electrode and the state change element. Another aspect comprises forming a first electrode in a manner to deliberately establish a certain degree of amorphization in the first electrode, forming a state change element in contact with the first electrode. The degree of amorphization of the first electrode is either at least as great as the degree of amorphization of the state change element or no more than 5 percent less than the degree of amorphization of the state change element.
1. A storage device comprising:
a memory cell comprising:
a bottom electrode;
a metal-oxide state change memory element in contact with the bottom electrode, wherein the metal-oxide state change memory element comprises ZnMnO;
a top electrode in direct contact with the metal-oxide state change memory element, the top electrode comprises TaCN; and
a steering device in series with the bottom electrode, the metal-oxide state change memory element, and the top electrode.
2. The storage device of claim 1 wherein the bottom electrode comprises at least one of TiN or oxidized TiN.
3. The storage device of claim 1 wherein the bottom electrode comprises TiN.
4. The storage device of claim 1 wherein the bottom electrode comprises TiON.
5. A storage device comprising:
a plurality of first conductors serving as bit lines;
a plurality of second conductors serving as word lines;
a plurality of memory cells between ones of the first conductors and ones of the second conductors;
an individual memory cell comprising;
a bottom electrode;
a metal-oxide state change memory element in contact with the bottom electrode; and
a top electrode in direct contact with the metal-oxide state change memory element, the top electrode comprises a first region and a second region, the first region is directly adjacent to the state change element, the first region comprises TiSiN, the second region comprises TiAlN.
6. The storage device as recited in claim 5 , further comprising a steering device in series with the bottom electrode, the state change element, and the top electrode.
7. A method for forming a storage device, the method comprising:
forming a bottom electrode;
forming a metal-oxide state change memory element in contact with the bottom electrode, wherein the metal-oxide state change memory element comprises ZnMnO;
forming a top electrode in direct contact with the metal-oxide state change memory element, the top electrode comprises TaCN; and
forming a steering device in series with the bottom electrode, the metal-oxide state change memory element, and the top electrode.
8. The method for forming a storage device of claim 7 wherein the bottom electrode comprises at least one of TiN or oxidized TiN.
9. The method for forming a storage device of claim 7 wherein the bottom electrode comprises TiN.
10. The method for forming a storage device of claim 7 wherein the bottom electrode comprises TiON.
11. A method for forming a storage device comprising:
forming a plurality of first conductors to serve as word lines;
forming a plurality of second conductors to serve as bit lines;
forming plurality cells between ones of the plurality of first conductors and ones of the plurality of second conductors, wherein forming an individuals memory cell comprises;
forming a bottom electrode;
forming a metal-oxide state change memory element in contact with the bottom electrode;
depositing material for a top electrode in direct contact with the metal-oxide state change memory element, the material for the top electrode comprises a first region and a second region, the first region is directly adjacent to the metal-oxide state change memory element, the first region comprises TiSiN, the second region comprises TiAlN; and
performing a thermal anneal after depositing the material for the top electrode.
12. The method of claim 11 , wherein the thermal anneal is performed to establish a work function of the top electrode.