Semiconductor device and method of mounting cover to semiconductor die and interposer with adhesive material
A semiconductor device has an interposer with a die attach area interior to the interposer and cover attach area outside the die attach area. A channel is formed into a surface of the interposer within the cover attach area. A dam material is formed over the surface of the interposer within the cover attach area between the channel and edge of the interposer. A semiconductor die is mounted to the die attach area of the interposer. An adhesive material is deposited in the cover attach area away from the channel and dam material. A cover, such as a heat spreader or shielding layer, is mounted to the die and interposer within the cover attach area. The cover presses the adhesive material into the channel and against the dam material to control outward flow of the adhesive material. Alternatively, ACF can be formed over the interposer to mount the cover.
1. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a semiconductor die over a surface of the substrate;
forming a containment structure on the surface of the substrate and extending from the surface of the substrate to a height less than a height of the semiconductor die;
providing a cover;
depositing a conductive adhesive material on the surface of the substrate between the semiconductor die and containment structure; and
disposing the cover over the semiconductor die and substrate and in contact with the conductive adhesive material and containment structure, wherein the containment structure blocks outward flow of the conductive adhesive material.
2. The method of claim 1 , further including disposing the semiconductor die and cover over the substrate simultaneously.
3. The method of claim 1 , wherein forming the containment structure further includes forming one or more channels in the surface of the substrate.
4. The method of claim 1 , wherein forming the containment structure includes forming one or more dam materials over the surface of the substrate.
5. The method of claim 1 , wherein the cover includes a heat spreader or shielding layer.
6. The method of claim 1 , further including a thermal interface material disposed between the semiconductor die and cover.
7. The method of claim 1 , wherein the cover includes a first horizontal component over the semiconductor die, down-step vertical component extending from the first horizontal component, and second horizontal component extending from the down-step vertical component and contacting the conductive adhesive material and containment structure.
8. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a semiconductor die over a surface of the substrate;
forming a containment structure on the surface of the substrate below a surface of the semiconductor die opposite the substrate;
providing a cover;
depositing an adhesive material over the cover or substrate; and
disposing the cover over the semiconductor die and substrate and in contact with the containment structure, wherein the containment structure blocks outward flow of the adhesive material.
9. The method of claim 8 , further including disposing a thermal interface material between the semiconductor die and cover.
10. The method of claim 8 , wherein forming the containment structure further includes forming one or more channels in the substrate.
11. The method of claim 8 , wherein forming the containment structure includes forming one or more dam materials over the substrate.
12. The method of claim 8 , wherein the cover includes a heat spreader or shielding layer.
13. The method of claim 8 , wherein the adhesive material includes a conductive adhesive material.
14. The method of claim 8 , wherein forming the containment structure includes forming two dam materials of different heights over the surface of the substrate.
15. The method of claim 8 , wherein the cover includes a first horizontal component over the semiconductor die, down-step vertical component extending from the first horizontal component, and second horizontal component extending from the down-step vertical component and contacting the containment structure.
16. A semiconductor device, comprising:
a substrate;
a semiconductor die disposed over a surface of the substrate;
a containment structure formed on the surface of the substrate, wherein the containment structure is disposed below a surface of the semiconductor die opposite the substrate;
a cover disposed over the semiconductor die and substrate and contacting the containment structure; and
an adhesive material bonding the cover to the substrate with the containment structure disposed outside the adhesive material.
17. The semiconductor device of claim 16 , wherein the containment structure further includes one or more channels formed in the substrate.
18. The semiconductor device of claim 16 , wherein the adhesive material includes a conductive material.
19. The semiconductor device of claim 16 , wherein the containment structure includes one or more dam materials formed over the substrate.
20. The semiconductor device of claim 16 , wherein the cover includes a heat spreader or shielding layer.
21. The semiconductor device of claim 16 , further including a thermal interface material disposed between the semiconductor die and cover.
22. The semiconductor device of claim 16 , wherein the containment structure includes two dam materials of different heights formed over the surface of the substrate.
23. The semiconductor device of claim 16 , wherein the cover includes a first horizontal component over the semiconductor die, down-step vertical component extending from the first horizontal component, and second horizontal component extending from the down-step vertical component and contacting the containment structure.
24. A method of making a semiconductor device, comprising:
providing a substrate;
forming an anisotropic conductive layer over the substrate;
disposing a semiconductor die over the substrate by pressing the semiconductor die into the anisotropic conductive layer to electrically connect to the substrate through the anisotropic conductive layer; and
disposing a cover over the semiconductor die, the cover including a down-step pressed into the anisotropic conductive layer to contact the substrate through the anisotropic conductive layer.
25. The method of claim 24 , wherein the anisotropic conductive layer includes an anisotropic conductive film, anisotropic conductive paste, or anisotropic conductive adhesive.
26. The method of claim 24 , wherein compressing the semiconductor die into the anisotropic conductive layer forms an electrical connection between the semiconductor die and substrate.
27. The method of claim 24 , further including disposing the semiconductor die and cover over the substrate simultaneously.
28. The method of claim 24 , wherein the cover includes a heat spreader or shielding layer.
29. The method of claim 24 , further including disposing a thermal interface layer between the cover and semiconductor die.
30. The method of claim 24 , wherein the cover includes a first horizontal component over the semiconductor die, down-step vertical component extending from the first horizontal component, and second horizontal component extending from the down-step vertical component and pressed into the anisotropic conductive layer to contact the substrate through the anisotropic conductive layer.