Semiconductor device with dummy metal protective structure around semiconductor die for localized planarization of insulating layer
A semiconductor wafer contains a plurality of semiconductor die separated by a saw street. A contact pad is formed over an active surface of the semiconductor die. A protective pattern is formed over the active surface of the semiconductor die between the contact pad and saw street of the semiconductor die. The protective pattern includes a segmented metal layer or plurality of parallel segmented metal layers. An insulating layer is formed over the active surface, contact pad, and protective pattern. A portion of the insulating layer is removed to expose the contact pad. The protective pattern reduces erosion of the insulating layer between the contact pad and saw street of the semiconductor die. The protective pattern can be angled at corners of the semiconductor die or follow a contour of the contact pad. The protective pattern can be formed at corners of the semiconductor die.
1. A semiconductor device, comprising:
a semiconductor die;
a conductive layer formed in contact with a surface of the semiconductor die in a perimeter region of the semiconductor die;
a protective pattern formed in contact with the surface of the semiconductor die and separated from the conductive layer, wherein the protective pattern extends along a first edge of the semiconductor die to a corner of the semiconductor die and further continues with an angle around the corner and along a second edge of the semiconductor die adjacent to the first edge of the semiconductor die; and
a first insulating layer formed over the surface of the semiconductor die and between the conductive layer and protective pattern at the corner of the semiconductor die.
2. The semiconductor device of claim 1 , wherein the protective pattern includes a metal layer.
3. The semiconductor device of claim 1 , wherein the protective pattern is segmented.
4. The semiconductor device of claim 1 , further including an encapsulant formed over the semiconductor die.
5. The semiconductor device of claim 1 , further including a second insulating layer formed over the surface of the semiconductor die including an opening to the conductive layer.
6. The semiconductor device of claim 1 , wherein the protective pattern is further formed as a polygon or rounded shape at the corner of the semiconductor die.
7. A semiconductor device, comprising:
a semiconductor die;
a conductive layer formed on a surface of the semiconductor die;
a protective pattern formed on the surface of the semiconductor die, wherein the protective pattern extends along first and second adjacent edges of the semiconductor die and around a corner of the semiconductor die between the first and second adjacent edges; and
a first insulating layer formed over the semiconductor die and between the conductive layer and protective pattern.
8. The semiconductor device of claim 7 , wherein the protective pattern includes a metal layer.
9. The semiconductor device of claim 7 , wherein the protective pattern is segmented.
10. The semiconductor device of claim 7 , further including an encapsulant formed over the semiconductor die.
11. The semiconductor device of claim 7 , wherein the protective pattern is further formed as a polygon or rounded shape at the corner of the semiconductor die.
12. The semiconductor device of claim 7 , wherein the protective pattern is rounded or angled at the corner of the semiconductor die.