IP Library Granted Patent US 9,389,363
Granted Patent B2
US 9,389,363 · App. 14/696,034 · Granted Jul 12, 2016

Double mirror structure for wavelength division multiplexing with polymer waveguides

Inventor: Jean Benoit Héroux (Tokyo, JP)
Assignee: GLOBALFOUNDRIES INC.
G02B6/12007G02B6/132G02B6/4214G02B6/4215G02B2006/12109G02B2006/12164Y10T29/49117
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Quick Facts
Patent No.
US 9,389,363
App. No.
14/696,034
Granted
Jul 12, 2016
Kind
B2
Abstract

Methods for wavelength filtering and structures for accomplishing the same. Wavelength filtering includes forming grooves in a waveguide to define angled surfaces in a path of the waveguide; forming a reflective layer on the angled surfaces; depositing cladding material on top of the waveguide and on the angled surfaces; forming a filter layer on an active region of an opto-electronic device, which transmits a single wavelength and reflects other wavelengths used; depositing the opto-electrical device on the cladding layer such that the filter layer is aligned with a point of incidence of a light beam reflected from the reflective layer; and electrically bonding the opto-electronic device to vias in the waveguide structure.

Claims (34)

1. A wavelength filtering structure, comprising:

a first reflective surface, positioned at an end of a first waveguide section, that reflects a beam comprising a plurality of wavelengths;

a filter in the path of the reflected beam that allows a selected wavelength from the reflected beam to pass and that reflects all other wavelengths in a selected beam;

a second reflective surface, positioned adjacent to the first reflective surface and at an end of a second waveguide section, that reflects the selected beam into a core of the second waveguide section; and

an emitter configured to emit the selected wavelength through the filter, wherein the emitter is aligned with the filter.

2. The wavelength filtering structure of claim 1 , wherein the first and second reflective surfaces are formed at an angle relative to the beam path.

3. The wavelength filtering structure of claim 2 , wherein the first and second reflective surfaces are formed at an angle less than 45 degrees relative to the beam path.

4. The wavelength filtering structure of claim 1 , further comprising a photodetector configured to receive the selected wavelength that passes through the filter.

5. The wavelength filtering structure of claim 1 , wherein the emitter comprises a lens configured to orient the emitted light in a direction parallel to the existing beam.

6. The wavelength filtering structure of claim 1 , wherein the emitter is set at a non-zero lateral distance from a point of incidence on the filter where the reflected beam hits.

7. The wavelength filtering structure of claim 6 , wherein the emitted wavelength reflects from the second reflective surface to enter the second waveguide section.

8. The wavelength filtering structure of claim 1 , further comprising a focusing element at an end of the first waveguide section configured to compensate for beam divergence.

9. A wavelength division multiplexer/demultiplexer, comprising:

a plurality of filtering structures formed next to each other on a board, each transmitting a different wavelength from a beam comprising a plurality of wavelengths, each filtering structure including:

a first reflective surface, positioned at an end of a first waveguide section, that reflects the beam comprising a plurality of wavelengths, formed at an angle less than 45 degrees relative to a beam path and having a curve to compensate for beam divergence;

a filter in the path of the reflected beam that allows the selected wavelength from the reflected beam to be transmitted and that reflects all other wavelengths in a selected beam;

a second reflective surface, positioned adjacent to the first reflective surface and at an end of a second waveguide section, that reflects the selected beam to the end of the second waveguide section, formed at an angle less than 45 degrees relative to the beam path; and

an emitter configured to emit the selected wavelength through the filter, wherein the emitter is aligned with the filter.

10. A method for forming a wavelength filtering structure, comprising:

forming grooves in a waveguide to define angled surfaces in a path of the waveguide;

forming a reflective layer on the angled surfaces;

depositing cladding material on top of the waveguide and on the angled surfaces;

forming a filter layer on an active region of an opto-electronic device, which transmits a single wavelength and reflects other wavelengths used;

depositing the opto-electrical device on the cladding layer such that the filter layer is aligned with a point of incidence of a light beam reflected from the reflective layer, and such that the filter layer is aligned with an emitter configured to emit the single wavelength through the filter layer; and

electrically bonding the opto-electronic device to vias in the waveguide structure.

11. The method of claim 10 , wherein forming grooves comprises forming the angled surfaces at an angle less than 45 degrees relative to a waveguide axis.

12. The method of claim 10 , wherein the opto-electronic device comprises a photodetector configured to receive the selected wavelength that passes through the filter and wherein said step of bonding comprises bonding a surface of the electrical device having said photodetector to the cladding layer such that the photodetector is aligned with a point of incidence of a beam.

13. The method of claim 10 , wherein said step of bonding comprises bonding a surface of the electrical device having said emitter to the cladding layer such that the emitter is set to a non-zero lateral distance from a point of incidence of a beam.

14. The wavelength filtering structure of claim 1 , wherein the first reflective surface has a curve along a single axis to compensate for beam divergence in a single dimension.

15. The wavelength filtering structure of claim 1 , wherein the first waveguide section is tapered relative to a carrying width of the first waveguide section, and wherein the second waveguide section is widened relative to a carrying width of the second waveguide section.

16. The wavelength division multiplexer/demultiplexer of claim 9 , wherein the first reflective surface has a curve along a single axis to compensate for beam divergence.

17. The wavelength division multiplexer/demultiplexer of claim 9 , wherein the first waveguide section is tapered relative to a carrying width of the first waveguide section, and wherein the second waveguide section is widened relative to a carrying width of the second waveguide section.

18. The method of claim 10 , further comprising forming a waveguide having a first section that tapers and a second section that is widened relative to a carrying width of the respective waveguide sections.

19. The method of claim 10 , wherein one of the grooves is formed with a curve along a single axis of one of the angled surfaces to compensate for beam divergence.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 24, 2015
From: HEROUX, JEAN BENOIT
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 035493/0218 →
Continuity (2)
Continuation 14067535 · Oct 30, 2013
Related Publication 20150226917A1 · Aug 13, 2015