IP Library Granted Patent US 9,659,131
Granted Patent B2
US 9,659,131 · App. 14/754,585 · Granted May 23, 2017

Copper feature design for warpage control of substrates

Inventors: Edmund Blackshear (Wappinger Falls, NY); Anson Jay Call (Poughkeepsie, NY); Vijayeshwar Das Khanna (Millwood, NY); Douglas Oliver Powell (Endicott, NY); David John Russell (Oswego, NY)
Assignee: GLOBALFOUNDRIES INC.
G06F17/5072G06F17/5009H01L23/145H01L23/49822H01L23/49838H01L23/49866H01L23/562G06F2217/42H01L2924/0002
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Quick Facts
Patent No.
US 9,659,131
App. No.
14/754,585
Granted
May 23, 2017
Kind
B2
Abstract

An approach is provided in which a laminate substrate includes top layers, bottom layers, and a core layer. The top layers are positioned between the core layer and a top surface metallurgy (TSM) layer and include at least one top conductive layer. The bottom layers are positioned between the core layer and a bottom surface metallurgy (BSM) layer and include at least one bottom conductive layer includes a material void pattern that is based upon the top conductive layer and reduces warpage of the laminate substrate.

Claims (23)

1. A method comprising:

retrieving a first layer design and a second layer design, the first layer design corresponding to a first conductive layer included in a laminate substrate and the second layer design corresponding to a second conductive layer included in the laminate substrate;

identifying a first conductive material pattern in the first layer design;

selecting a material void pattern based upon the first conductive material pattern; and

including the selected material void pattern in the second layer design that removes a portion of conductive material from the second conductive layer, wherein the inclusion of the selected material void pattern reduces warpage of the laminate substrate.

2. The method of claim 1 further comprising:

computing a first layer bending resistance value and a second layer bending resistance value, the first layer bending resistance value based upon the first layer design and the second layer bending resistance value based upon the second layer design;

computing a bending resistance differential based upon the first layer bending resistance value and the second layer bending resistance value;

determining that the bending resistance differential exceeds a threshold; and

generating the material void pattern in response to determining that the bending resistance differential exceeds the threshold.

3. The method of claim 2 wherein the first layer bending resistance value includes a directional bending resistance component based upon one or more wiring patterns included in the first layer design.

4. The method of claim 3 wherein the material void pattern is based upon at least one of the one or more wiring patterns.

5. The method of claim 1 wherein the second conductive layer is selected from the group consisting of a power layer and a ground layer, and wherein the removal of the conductive material creates one or more non-contiguous conductive areas on the second conductive layer.

6. The method of claim 1 wherein the material void pattern is a channel pattern that forms one or more non-contiguous shapes.

7. The method of claim 6 wherein the channel pattern includes straight lines that forms the one or more non-contiguous shapes.

8. A product made by a method comprising:

retrieving a first layer design and a second layer design, the first layer design corresponding to a first conductive layer included in a laminate substrate and the second layer design corresponding to a second conductive layer included in the laminate substrate;

identifying a first conductive material pattern in the first layer design;

selecting a material void pattern based upon the first conductive material pattern; and

including the selected material void pattern in the second layer design, wherein the material void pattern is adapted to remove a portion of conductive material from the second conductive layer and reduce warpage of the laminate substrate.

9. The product of claim 8 the material void pattern fails to change electrical connectivity between a plurality of nodes included in the second layer design.

10. The product of claim 8 wherein the material void pattern is based upon a wiring pattern included in the first layer design.

11. The product of claim 8 wherein the material void pattern is a channel pattern that forms one or more non-contiguous shapes.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 15, 2016
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 037542/0087 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 3, 2016
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 037409/0869 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 9, 2015
From: BLACKSHEAR, EDMUND; CALL, ANSON JAY; KHANNA, VIJAYESHWAR DAS; POWELL, DOUGLAS OLIVER; RUSSELL, DAVID JOHN
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 036088/0628 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 29, 2015
From: BLACKSHEAR, EDMUND; CALL, ANSON JAY; KHANNA, VIJAYESHWAR DAS; POWELL, DOUGLAS OLIVER; RUSSELL, DAVID JOHN
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 035999/0028 →
Continuity (2)
Division 13527280 · Jun 19, 2012
Related Publication 20150317423A1 · Nov 5, 2015