Patent Assignment
Reel/Frame 010206/0041
Assignment of Assignor's Interest
Recorded: 1999-09-01
Pages: 4
Assignor
SPUTTERED FILMS, INC.
Executed: 1999-08-24
Assignee
SHAMROCK TECHNOLOGY CORP.
35 CABOT ROAD, WOBURN, MASSACHUSETTS, 01801
Covered Properties
(6)
End Effector Assembly for Inclusion in a System for Producing Uniform Deposits on a Wafer
Patent:
6,117,238 →
Application:
08/714,804 →
System for and Method of Providing a Controlled Deposition of Wafers
Patent:
6,176,987 →
Application:
08/788,408 →
System for and Method of Providing a Controlled Deposition on Wafers
Application:
08/788,409 →
System for and Method of Providing a Controlled Deposition on Wafers
Patent:
6,083,357 →
Application:
08/791,503 →
End Effector Assembly for Inclusion in a System for Producing Uniform Deposits on a Wafer
Patent:
6,051,066 →
Application:
09/059,883 →
Apparatus for, and Method of, Providing Controlled Depositions on Substrates
Patent:
6,159,290 →
Application:
09/165,689 →
Related Assignments
(5)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 17, 1996
From: BEGIN,ROBERT GEORGE
To: SPUTTERED FILMS,INC. (A CA CORP.)
Reel/Frame 008228/0259 →
Security Agreement
Nov 3, 1997
From: SPUTTERED FILMS, INC.
To: FINOVA CAPITAL CORPORATION
Reel/Frame 008766/0855 →
Assignment of Assignor's Interest
Dec 14, 1998
From: CLARKE, PETER J.; BARB, AMOS
To: SPUTTERED FILMS, INC.
Reel/Frame 009654/0848 →
Assignment of Assignor's Interest
Jan 13, 2003
From: SHAMROCK TECHNOLOGY CORP.
To: APPLIED SCIENCE & TECHNOLOGY, INC.
Reel/Frame 013645/0778 →
Assignment of Assignor's Interest
Jul 1, 2005
From: APPLIED SCIENCE AND TECHNOLOGY, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 016700/0252 →