Patent Assignment
Reel/Frame 012529/0548
Assignment of Assignor's Interest
Recorded: 2001-10-25
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Wafer Pedestal Tilt Mechanism and Cooling System
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Consent and License Agreement
Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →