IP Library Assignment 012529/0548
Patent Assignment
Reel/Frame 012529/0548

Assignment of Assignor's Interest

Recorded: 2001-10-25 Pages: 3
Assignors
WEED, ALLAN
Executed: 2001-10-24
FISH, ROGER B.
Executed: 2001-10-24
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Wafer Pedestal Tilt Mechanism and Cooling System
Patent: 6,734,439 →
Application: 10/054,325 →
Publication: US 2003/0080300
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Agreement Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →