Patent Assignment
Reel/Frame 012659/0895
Assignment of Assignor's Interest
Recorded: 2002-02-26
Pages: 3
Assignors
USHIKI, TAKEO
Executed: 2002-02-13
YAMADA, KEIZO
Executed: 2002-02-13
ITAGAKI, YOHSUKE
Executed: 2002-02-13
TSUJIDE, TOHRU
Executed: 2002-02-13
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Surface Contamination Analyzer for Semiconductor Wafers, Method Used Therein and Process for Fabricating Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.