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App. No. 10/083,440 · Confirmation No. 6474

SURFACE CONTAMINATION ANALYZER FOR SEMICONDUCTOR WAFERS, METHOD USED THEREIN AND PROCESS FOR FABRICATING SEMICONDUCTOR DEVICE

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2004-05-10 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-05-05 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-04-26 LET. Miscellaneous Incoming Letter 3 View
2004-03-03 PA.. Power of Attorney 9 View
2004-02-23 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2004-02-23 1449 List of References cited by applicant and considered by examiner 2 View
2004-02-23 892 List of references cited by examiner 1 View
2004-02-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-23 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-23 FWCLM Index of Claims 1 View
2004-02-04 SRNT Examiner's search strategy and results 1 View
2003-07-07 ELC. Response to Election / Restriction Filed 2 View
2003-06-06 CTRS Requirement for Restriction/Election 4 View
2003-04-10 SRNT Examiner's search strategy and results 1 View
2002-05-20 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-02-26 TRNA Transmittal of New Application 2 View
2002-02-26 SPEC Specification 35 View
2002-02-26 CLM Claims 6 View
2002-02-26 ABST Abstract 1 View
2002-02-26 DRW Drawings-only black and white line drawings 9 View
2002-02-26 OATH Oath or Declaration filed 4 View
2002-02-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-02-26 FWCLM Index of Claims 1 View
2002-02-26 TRNA Transmittal of New Application 2 View
2002-02-26 DRW Drawings-only black and white line drawings 9 View
2002-02-26 SPEC Specification 35 View
2002-02-26 CLM Claims 6 View
2002-02-26 ABST Abstract 1 View
2002-02-26 OATH Oath or Declaration filed 4 View
2002-02-26 WFEE Fee Worksheet (SB06) 1 View
2002-02-26 WFEE Fee Worksheet (SB06) 1 View
2002-02-26 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-26 FRPR Certified Copy of Foreign Priority Application 38 View
2002-02-26 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-02-26 FOR Foreign Reference 12 View
2002-02-26 FOR Foreign Reference 9 View
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Quick Facts
App. No.
10/083,440
Filed
2002-02-26
Granted
2004-06-22
Pub. No.
US20020123161A1
Art Unit
2818
PTA
-58 days