Patent Assignment
Reel/Frame 016418/0136
Assignment of Assignor's Interest
Recorded: 2005-08-18
Pages: 10
Assignor
SPEEDFAM-IPEC CORPORATION, FORMERLY INTEGRATED PROCESS EQUIPMENT CORP.
Executed: 2004-12-10
Assignee
ADE CORPORATION
80 WILSON WAY, WESTWOOD, MASSACHUSETTS, 02090
Covered Properties
(11)
Apparatus and Method for Interferometaically Measuring the Thickness of Thin Films Using Full Aperture Irradiation
Patent:
5,333,049 →
Application:
07/804,872 →
Apparatus and Method for Performing Thin Film Layer Thickness Metrology by Deforming a Thin Film Layer into a Reflective Condenser
Patent:
5,293,214 →
Application:
07/891,344 →
Apparatus and Method for Performing Thin Film Layer Thickness Metrology on a Thin Film Layer Having Shape Deformations and Local Slope Variations
Patent:
5,291,269 →
Application:
07/906,079 →
Apparatus and Method for Measuring the Thickness of Thin Films
Patent:
5,365,340 →
Application:
07/987,926 →
Apparatus and Method for Thick Wafer Measurement
Patent:
5,386,119 →
Application:
08/037,069 →
Film Thickness Measurement of Structures Containing a Scattering Surface
Patent:
5,452,953 →
Application:
08/134,728 →
Cofocal Optical System for Thickness Measurements of Patterned Wafers
Patent:
5,436,725 →
Application:
08/134,729 →
Substrate Thickness Measurement Using Oblique Incidence Multispectral Interferometry
Patent:
5,502,564 →
Application:
08/304,982 →
Transparent Optical Chuck Incorporating Optical Monitoring
Patent:
5,515,167 →
Application:
08/304,984 →
Apparatus and Method for Performing High Spatial Resolution Thin Film Layer Thickness Metrology
Patent:
5,543,919 →
Application:
08/309,516 →
Automatic Rejection of Diffraction Effects in Thin Film Metrology
Patent:
5,555,474 →
Application:
08/360,535 →
Related Assignments
(13)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest.
Dec 6, 1991
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 005948/0256 →
Assignment of Assignors Interest.
May 29, 1992
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006160/0034 →
Assignment of Assignors Interest.
Jun 29, 1992
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006204/0067 →
Assignment of Assignors Interest.
Mar 25, 1993
From: LEDGER, ANTHONY
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006493/0189 →
Assignment of Assignor's Interest
Oct 12, 1993
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006725/0827 →
Assignment of Assignor's Interest
Oct 12, 1993
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006736/0949 →
Assignment of Assignor's Interest
Nov 14, 1994
From: LEDGER, ANTHONY; POWER, MICHAEL
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 007321/0943 →
Assignment of Assignor's Interest
Dec 9, 1994
From: LEDGER, ANTHONY
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 007261/0606 →
Assignment of Assignor's Interest
Dec 21, 1994
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 007295/0169 →
Assignment of Assignor's Interest
Feb 20, 1996
From: HUGHES AIRCRAFT COMPANY
To: INTEGRATED PROCESS EQUIPMENT CORP.
Reel/Frame 007824/0119 →
Assignment of Assignor's Interest
Jun 13, 1996
From: HUGHES AIRCRAFT COMPANY
To: INTEGRATED PROCESS EQUIPMENT CORP.
Reel/Frame 007991/0547 →
Security Interest
Jun 21, 1996
From: INTEGRATED PROCESS EQUIPMENT
To: FIRST INTERSTATE BANK OF ARIZONA, N.A.
Reel/Frame 008000/0438 →
Release of Security Agreement
Feb 5, 1999
From: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT, FORMERLY FIRST INTERSTATE BANK OF ARIZONA, N.A.
To: INTEGRATED PROCESS EQUIPMENT CORP.
Reel/Frame 009737/0571 →