Patent Assignment
Reel/Frame 008000/0438
Security Interest
Recorded: 1996-06-21
Pages: 11
Assignor
INTEGRATED PROCESS EQUIPMENT
Executed: 1996-04-24
Assignee
FIRST INTERSTATE BANK OF ARIZONA, N.A.
AS AGENT UNDER LOAN AGREEMENT DATED 4/24/96, 100 WEST WASHINGTON, P.O. BOX 29742, PHOENIX, ARIZONA, 85038
Covered Properties
(44)
System for Removing Material from a Wafer
Patent:
5,254,830 →
Application:
07/696,897 →
Apparatus and Method for Interferometaically Measuring the Thickness of Thin Films Using Full Aperture Irradiation
Patent:
5,333,049 →
Application:
07/804,872 →
Methods and Apparatus for Confinement of a Plasma Etch Region for Precision Shaping of Surfaces of Substances and Films
Patent:
5,336,355 →
Application:
07/807,535 →
Methods and Apparatus for Generating a Plasma for "Downstream" Rapid Shaping of Surfaces of Substrates and Films
Patent:
5,290,382 →
Application:
07/807,536 →
Method to Determine Tool Paths for Thinning and Correcting Errors in Thickness Profiles of Films
Patent:
5,291,415 →
Application:
07/807,544 →
Apparatus for Providing Consistent Registration of Semiconductor Wafers
Patent:
5,180,150 →
Application:
07/825,520 →
Method and Apparatus for Removal of Subsurface Damage in Semiconductor Materials by Plasma Etching
Patent:
5,238,532 →
Application:
07/842,828 →
Method and Apparatus for Non-Contact Plasma Polishing and Smoothing of Uniformly Thinned Substrates
Patent:
5,376,224 →
Application:
07/842,936 →
Method and Apparatus for Producing Variable Spatial Frequency Control in Plasma Assisted Chemical Etching
Patent:
5,292,400 →
Application:
07/854,718 →
Apparatus and Method for Shielding a Workpiece Holding Mechanism from Depreciative Effects During Workpiece Processing
Patent:
5,365,031 →
Application:
07/855,404 →
Apparatus and Method for Performing Thin Film Layer Thickness Metrology by Deforming a Thin Film Layer into a Reflective Condenser
Patent:
5,293,214 →
Application:
07/891,344 →
Apparatus and Method for Optimally Scanning a Two-Dimensional Surface of One or More Objects
Patent:
5,282,921 →
Application:
07/899,419 →
Apparatus and Method for Performing Thin Film Layer Thickness Metrology on a Thin Film Layer Having Shape Deformations and Local Slope Variations
Patent:
5,291,269 →
Application:
07/906,079 →
Apparatus and Method for Performing Thin Film Layer Thickness Metrology Using a Correlation Reflectometer
Patent:
5,337,150 →
Application:
07/925,721 →
Apparatus for Providing Consistent, Non-Jamming Registration of Semiconductor Wafers
Patent:
5,352,249 →
Application:
07/937,793 →
Plasma Pressure Control Assembly
Application:
07/986,649 →
Fluid Mixer
Patent:
5,362,150 →
Application:
07/986,650 →
Apparatus and Method for Measuring the Thickness of Thin Films
Patent:
5,365,340 →
Application:
07/987,926 →
Apparatus for Optimally Scanning a Two-Dimensional Surface of One or More Objects
Patent:
5,312,510 →
Application:
08/036,310 →
Apparatus and Method for Thick Wafer Measurement
Patent:
5,386,119 →
Application:
08/037,069 →
Apparatus and Method for Providing Consistent, Non-Jamming Registration of Notched Semiconductor Wafers
Application:
08/046,053 →
Electrode for Use in a Plasma Assisted Chemical Etching Process
Application:
08/062,087 →
Apparatus and Method for Performing High Spatial Resolution Thin Film Layer Thickness Metrology
Application:
08/064,316 →
Electrode Assembly Useful in Confined Plasma Assisted Chemical Etching
Patent:
5,298,103 →
Application:
08/093,120 →
Highly Durable Noncontaminating Surround Materials for Plasma Etching
Patent:
5,364,496 →
Application:
08/110,021 →
Film Thickness Measurement of Structures Containing a Scattering Surface
Patent:
5,452,953 →
Application:
08/134,728 →
Cofocal Optical System for Thickness Measurements of Patterned Wafers
Patent:
5,436,725 →
Application:
08/134,729 →
Method for Co-Registering Semiconductor Wafers Undergoing Work in One or More Blind Process Modules
Patent:
5,610,102 →
Application:
08/152,780 →
Wafer Flow Architecture for Production Wafer Processing
Patent:
5,474,647 →
Application:
08/153,236 →
Method of Planarizing Microstructures
Patent:
5,419,803 →
Application:
08/153,681 →
Method and Apparatus for a Material Removal Tool with Low Tol Accelera Tions
Patent:
5,375,064 →
Application:
08/162,510 →
Method and Apparatus for Measuring Film Thickness in Multilayer Thin Film Stack by Comparison to a Reference Library of Theoretical Signatures
Patent:
5,555,472 →
Application:
08/179,594 →
Electrode for Use in a Plasma Assisted Chemical Etching Process
Patent:
5,372,674 →
Application:
08/189,262 →
System for Improving the Total Thickness Variation of a Water
Application:
08/198,931 →
Plasma Pressure Control Assembly
Patent:
5,391,252 →
Application:
08/252,630 →
Apparatus and Method for Providing Consistent, Non-Jamming Registration of Notched Semiconductor Wafers
Application:
08/258,138 →
Substrate Thickness Measurement Using Oblique Incidence Multispectral Interferometry
Patent:
5,502,564 →
Application:
08/304,982 →
Apparatus for Measuring, Thinning and Flattening Silicon Structures
Patent:
5,563,709 →
Application:
08/304,983 →
Transparent Optical Chuck Incorporating Optical Monitoring
Patent:
5,515,167 →
Application:
08/304,984 →
Apparatus and Method for Performing High Spatial Resolution Thin Film Layer Thickness Metrology
Patent:
5,543,919 →
Application:
08/309,516 →
Solid Annular Gas Discharge Electrode
Patent:
5,567,255 →
Application:
08/322,820 →
Automatic Rejection of Diffraction Effects in Thin Film Metrology
Patent:
5,555,474 →
Application:
08/360,535 →
Localized Plasma Assisted Chemical Etching Through a Mask
Patent:
5,688,415 →
Application:
08/453,037 →
Pneumatic Polishing Head for Cmp Apparatus
Patent:
5,643,061 →
Application:
08/504,686 →
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest.
May 7, 1991
From: ZAROWIN, CHARLES; BOLLINGER, L. D.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 005698/0657 →
Assignment of Assignors Interest.
Dec 6, 1991
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 005948/0256 →
Assignment of Assignors Interest.
Dec 13, 1991
From: ZAROWIN, CHARLES B.; BOLLINGER, L. DAVID
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 005954/0324 →
Assignment of Assignors Interest.
Dec 13, 1991
From: ZAROWIN, CHARLES B.; BOLLINGER, L. DAVID
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 005952/0795 →
Assignment of Assignors Interest.
Dec 13, 1991
From: ZAROWIN, CHARLES B.; BOLLINGER, L. DAVID
To: HUGHES AIRCRAFT COMPANY A CORP. OF DELAWARE
Reel/Frame 005950/0941 →
Assignment of Assignors Interest.
Jan 24, 1992
From: PRUSAK, JOSEPH P.; BASSARO, ANTHONY T.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006001/0318 →
Assignment of Assignors Interest.
Feb 27, 1992
From: ZAROWIN, CHARLES B.; BOLLINGER, L. DAVID
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006039/0134 →
Assignment of Assignors Interest.
Feb 27, 1992
From: ZAROWIN, CHARLES B.
To: HUGHES AIRCRAFT COMPANY, A DE CORP.
Reel/Frame 006037/0968 →
Assignment of Assignors Interest.
Mar 23, 1992
From: MUMOLA, PETER B.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006084/0698 →
Assignment of Assignors Interest.
Mar 23, 1992
From: MUMOLA, PETER B.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006068/0329 →
Assignment of Assignors Interest.
May 29, 1992
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006160/0034 →
Assignment of Assignors Interest.
Jun 16, 1992
From: POULTNEY, SHERMAN
To: HUGHES AIRCRAFT COMPANY A DE CORP.
Reel/Frame 006165/0535 →
Assignment of Assignors Interest.
Jun 29, 1992
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006204/0067 →
Assignment of Assignors Interest.
Aug 4, 1992
From: MUMOLA, PETER B.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006234/0775 →
Assignment of Assignors Interest.
Aug 28, 1992
From: HAMPTON, GARY A.; ZIMMERMAN, PATRICK A.
To: UNIVERSITY CORPORATION FOR ATMOSPHERIC RESEARCH
Reel/Frame 006257/0802 →
Assignment of Assignors Interest.
Aug 28, 1992
From: VOLLARO, JOSEPH F.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006257/0799 →
Assignment of Assignors Interest.
Dec 8, 1992
From: TAYLOR, WILLIAM D.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006347/0524 →
Assignment of Assignors Interest.
Dec 8, 1992
From: TAYLOR, WILLIAM D.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006347/0207 →
Assignment of Assignors Interest.
Mar 25, 1993
From: LEDGER, ANTHONY
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006493/0189 →
Assignment of Assignor's Interest
Apr 12, 1993
From: VOLLARO, JOSEPH F.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006542/0405 →
Assignment of Assignor's Interest
May 14, 1993
From: MUMOLA, PETER B.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006577/0091 →
Assignment of Assignor's Interest
Jul 15, 1993
From: STEINBERG, GEORGE N.; ZAROWIN, CHARLES B.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006637/0367 →
Assignment of Assignor's Interest
Jul 29, 1993
From: STEINBERG, GEORGE
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006609/0460 →
Assignment of Assignor's Interest
Aug 20, 1993
From: BOLLINGER, LYNN DAVID; POWER, MICHAEL P.; POOLE, RICHARD R.; GARDOPEE, GEORGE J.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006675/0604 →
Assignment of Assignor's Interest
Oct 12, 1993
From: LEDGER, ANTHONY M.
To: HUGHES AIRCRAFT COMPANY
Reel/Frame 006736/0949 →