Patent Assignment
Reel/Frame 019266/0896
Assignment of Assignor's Interest
Recorded: 2007-05-07
Pages: 5
Assignors
YE, JOHN ZHENG
Executed: 2007-03-28
CRISTOFORO, MICHAEL PAUL
Executed: 2007-04-25
HUANG, YONGZHANG
Executed: 2007-04-26
GRAF, MICHAEL A.
Executed: 2007-04-24
VANDERBERG, BO H.
Executed: 2007-04-24
Assignee
AXCELIS TECHNOLOGIES, INC.
1081 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Method and System for Ion Beam Profiling
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement
Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →