IP Library › Assignment 020178/0286
Patent Assignment
Reel/Frame 020178/0286

Assignment of Assignor's Interest

Recorded: 2007-11-29 Pages: 5
Assignors
RUBIN, LEONARD M.
Executed: 2007-11-29
BERRY, IVAN
Executed: 2007-11-29
CLASS, WALTER
Executed: 2007-11-28
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
Structures and Methods for Measuring Beam Angle in an Ion Implanter
Patent: 7,728,293 →
Application: 11/947,632 →
Publication: US 2009/0140717
Related Assignments (5)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
First Amendment to Security Agreement May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →