IP Library › Assignment 021379/0992
Patent Assignment
Reel/Frame 021379/0992

Assignment of Assignor's Interest

Recorded: 2008-08-13 Pages: 3
Assignor
SATOH, SHU
Executed: 2008-08-12
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
System and Method of Beam Energy Identification for Single Wafer Ion Implantation
Patent: 7,973,290 →
Application: 12/190,736 →
Publication: US 2010/0038553
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →