Patent Assignment
Reel/Frame 022156/0579
Assignment of Assignor's Interest
Recorded: 2009-01-26
Pages: 6
Assignors
SMITH, DAVID B.
Executed: 2008-11-07
LEE, WILLIAM D.
Executed: 2008-10-30
LAFONTAINE, MARVIN R.
Executed: 2008-10-30
PUROHIT, ASHWIN M.
Executed: 2008-10-30
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Electrostatic Chuck Ground Punch
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Consent and License Agreement
Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →